Liquid-xenon-jet laser-plasma source for EUV lithography

被引：15

作者：

Hansson, BAM ^{[1
]}

Rymell, L ^{[1
]}

Berglund, M ^{[1
]}

Hemberg, O ^{[1
]}

Janin, E ^{[1
]}

Thoresen, J ^{[1
]}

Hertz, HM ^{[1
]}

机构：

[1] Innolite AB, SE-11550 Stockholm, Sweden

来源：

SOFT X-RAY AND EUV IMAGING SYSTEMS II | 2001年 / 4506卷

关键词：

EUV lithography; laser-produced plasma; liquid jet; xenon;

D O I：

10.1117/12.450943

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The liquid-xenon-jet laser-plasma source is one of the extreme-ultraviolet (EUV) source technologies under development for EUV lithography. This paper discuss the basic, demanding, requirements of a source for EUV lithography including high in-band EUV power, absence of mirror contamination and high stability It is further discussed how the liquid-xenon-jet can meet these requirements, and specifically how the ability to operate the plasma far from any mechanical details such as the nozzle will facilitate high power operation with low resulting mirror degradation. Furthermore, a new laser-to-EUV conversion efficiency result of 0.55 %/(2%BW 2pisr) at lambda=13.45 nm is presented together with a detailed description of the method for calibrated EUV-power measurement.

引用

页码：1 / 8

页数：8

共 22 条

[1] Cryogenic liquid-jet target for debris-free laser-plasma soft x-ray generation [J].

Berglund, M ;

Rymell, L ;

Hertz, HM ;

Wilhein, T .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (06) :2361-2364

[2]

BJORKHOLM JE, 1998, INTEL TECHNOLOGY J, P1

[3] Particle emission debris from a KrF laser-plasma x-ray source [J].

Bobkowski, R ;

Fedosejevs, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (04) :1973-1980

[4]

FIEDOROWICZ H, 1992, I PHYS C SER, V130, P515

[5] Xenon liquid-jet laser-plasma source for EUV lithography [J].

Hansson, BAM ;

Berglund, M ;

Hemberg, O ;

Hertz, HM .

EMERGING LITHOGRAPHIC TECHNOLOGIES IV, 2000, 3997 :729-732

[6] A liquid-xenon-jet laser-plasma X-ray and EUV source [J].

Hansson, BAM ;

Rymell, L ;

Berglund, M ;

Hertz, HM .

MICROELECTRONIC ENGINEERING, 2000, 53 (1-4) :667-670

[7]

HERTZ HM, 1999, Patent No. 6002744

[8] High-power extreme ultraviolet source based on gas jets [J].

Kubiak, GD ;

Bernardez, LJ ;

Krenz, K .

EMERGING LITHOGRAPHIC TECHNOLOGIES II, 1998, 3331 :81-89

[9]

KUBIAK GD, 2000, Patent No. 6011267

[10]

KUBIAK GD, 1995, OSA P, V21, P248

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