Microstructure and electric properties of (Pb0.8Ca0.2)TiO3 thin films prepared by rf magnetron sputtering with a seed layer

被引：7

作者：

Fu, M. ^{[1
]}

Chi, Q. G. ^{[2
]}

Wang, X. ^{[2
]}

Chen, Y. ^{[2
]}

Lei, Q. Q. ^{[2
]}

机构：

[1] NE Forestry Univ, Coll Mech & Elect Engn, Harbin 150040, Peoples R China

[2] Harbin Univ Sci & Technol, Sch Appl Sci, Minist Educ, Key Lab Engn Dielect & Its Applicat, Harbin 150080, Peoples R China

来源：

MATERIALS LETTERS | 2012年 / 80卷

基金：

美国国家科学基金会;

关键词：

Thin films; Pyroelectric properties; Leakage current; Texture; DECREASING GRAIN-SIZE; SOLUBILITY; INCREASE; ZNO;

D O I：

10.1016/j.matlet.2012.04.044

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The tetragonal (Pb0.8Ca0.2)TiO3 (PCT) thin films with and without Pb0.8La0.1Ca0.1Ti0.975O3 (PLCT) seed layer were deposited on the Pt(111)/Ti/SiO2/Si substrates by rf magnetron sputtering. The influence of seed layer on microstructures and electric properties of the PCT films was investigated, it was found that the PCT film without seed layer showed random orientation, while the film with seed layer exhibited strong (100) orientation. The PCT thin film with 14 nm-thick PLCT seed layer displayed enhanced electrical properties such as a large pyroelectric coefficient (256 mu C/m(2) K) and a low leakage current density (J<2 x 10(-5) A/cm(2)) at room temperature. The resulting high figure-of-merit (F-d = 173 mu C/m(2) K) indicates the highly oriented film good candidate for pyroelectric thin-film devices. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：20 / 22

页数：3

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