Multifrequency grating projection profilometry based on the nonlinear excess fraction method

被引:52
作者
Hao, YD [1 ]
Zhao, Y [1 ]
Li, DC [1 ]
机构
[1] Tsinghua Univ, Dept Precis Instruments, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
关键词
D O I
10.1364/AO.38.004106
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Although promised to be a fast and accurate three-dimensional shape measurement technique, grating projection profilometry based on phase measurement has been frequently baffled by the difficulty in phase unwrapping. We introduce the conventional excess fraction method into profilometry and extend it to nonlinear domain. Nonlinear excess fraction method (NLEFM), on the basis of which a multifrequency grating projection profilometry is developed, can work as a robust temporal phase unwrapper, which may extend the reliable measuring range by dozens of times at no cost of accuracy. The principle of NLEFM is detailed, and experimental results are given in which complex profiles are reliably measured with the novel system. (C) 1999 Optical Society of America.
引用
收藏
页码:4106 / 4110
页数:5
相关论文
共 11 条
[1]   N-point spatial phase-measurement techniques for non-destructive testing [J].
Creath, K ;
Schmit, J .
OPTICS AND LASERS IN ENGINEERING, 1996, 24 (5-6) :365-379
[2]   DIGITAL PHASE-SHIFTING INTERFEROMETRY - A SIMPLE ERROR-COMPENSATING PHASE CALCULATION ALGORITHM [J].
HARIHARAN, P ;
OREB, BF ;
EIJU, T .
APPLIED OPTICS, 1987, 26 (13) :2504-2506
[3]   Error-reduction methods for shape measurement by temporal phase unwrapping [J].
Huntley, JM ;
Saldner, HO .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1997, 14 (12) :3188-3196
[4]   A REVIEW OF PHASE UNWRAPPING TECHNIQUES IN FRINGE ANALYSIS [J].
JUDGE, TR ;
BRYANSTONCROSS, PJ .
OPTICS AND LASERS IN ENGINEERING, 1994, 21 (04) :199-239
[5]   Two-frequency grating used in phase-measuring profilometry [J].
Li, JL ;
Su, HJ ;
Su, XY .
APPLIED OPTICS, 1997, 36 (01) :277-280
[6]   A robust procedure for absolute phase measurement [J].
Nadeborn, W ;
Andra, P ;
Osten, W .
OPTICS AND LASERS IN ENGINEERING, 1996, 24 (2-3) :245-260
[7]   Profilometry using temporal phase unwrapping and a spatial light modulator-based fringe projector [J].
Saldner, HO ;
Huntley, JM .
OPTICAL ENGINEERING, 1997, 36 (02) :610-615
[8]   A NOVEL, ADAPTIVE SYSTEM FOR 3-D OPTICAL PROFILOMETRY USING A LIQUID-CRYSTAL LIGHT PROJECTOR [J].
SANSONI, G ;
BIANCARDI, L ;
MINONI, U ;
DOCCHIO, F .
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1994, 43 (04) :558-566
[9]   AUTOMATED PHASE-MEASURING PROFILOMETRY - A PHASE MAPPING APPROACH [J].
SRINIVASAN, V ;
LIU, HC ;
HALIOUA, M .
APPLIED OPTICS, 1985, 24 (02) :185-188
[10]   FOURIER-TRANSFORM PROFILOMETRY FOR THE AUTOMATIC-MEASUREMENT OF 3-D OBJECT SHAPES [J].
TAKEDA, M ;
MUTOH, K .
APPLIED OPTICS, 1983, 22 (24) :3977-3982