Tunable three-dimensional solid Fabry-Perot etalons fabricated by surface-micromachining

被引：14

作者：

Lin, LY ^{[1
]}

Shen, JL ^{[1
]}

Lee, SS ^{[1
]}

Wu, MC ^{[1
]}

Sergent, AM ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1996年 / 8卷 / 01期

关键词：

D O I：

10.1109/68.475792

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on novel tunable three-dimensional solid Fabry-Perot etalons fabricated by the surface-micromachining technique. The Fabry-Perot etalon is monolithically integrated with an on-chip rotation stage for angle tuning. A wavelength tuning range of 45 nm has been achieved at 1.3 mu m wavelength for a rotation angle of 70 degrees. The optical properties of the polysilicon materials have also been characterized using the etalon as testing vehicles.

引用

收藏

页码：101 / 103

页数：3

相关论文

共 12 条

[1] IC-PROCESSED ELECTROSTATIC MICROMOTORS [J].

FAN, LS ;

TAI, YC ;

MULLER, RS .

SENSORS AND ACTUATORS, 1989, 20 (1-2) :41-47

[2] A MINIATURE FABRY-PEROT-INTERFEROMETER WITH A CORRUGATED SILICON DIAPHRAGM SUPPORT [J].

JERMAN, JH ;

CLIFT, DJ ;

MALLINSON, SR .

SENSORS AND ACTUATORS A-PHYSICAL, 1991, 29 (02) :151-158

[3] SURFACE-MICROMACHINED FREE-SPACE MICRO-OPTICAL SYSTEMS CONTAINING 3-DIMENSIONAL MICROGRATINGS [J].

LEE, SS ;

LIN, LY ;

WU, MC .

APPLIED PHYSICS LETTERS, 1995, 67 (15) :2135-2137

[4] MICRO-MACHINED 3-DIMENSIONAL MICROOPTICS FOR INTEGRATED FREE-SPACE OPTICAL-SYSTEM [J].

LIN, LY ;

LEE, SS ;

PISTER, KSJ ;

WU, MC .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1994, 6 (12) :1445-1447

[5]

MOSES AJ, 1970, REFRACTIVE INDEX OPT, P8

[6] MICROFABRICATED HINGES [J].

PISTER, KSJ ;

JUDY, MW ;

BURGETT, SR ;

FEARING, RS .

SENSORS AND ACTUATORS A-PHYSICAL, 1992, 33 (03) :249-256

[7] OPTOELECTRONIC PACKAGING USING SILICON SURFACE-MICROMACHINED ALIGNMENT MIRRORS [J].

SOLGAARD, O ;

DANEMAN, M ;

TIEN, NC ;

FRIEDBERGER, A ;

MULLER, RS ;

LAU, KY .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1995, 7 (01) :41-43

[8] NARROW-BAND FIEND ETALON FILTERS USING EXPANDED-CORE FIBERS [J].

STONE, J ;

STULZ, LW ;

MARCUSE, D ;

BURRUS, CA ;

CENTANNI, JC .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1992, 10 (12) :1851-1854

[9]

VAIUL EC, 1995, ELECTRON LETT, V31, P228

[10]

WU MC, 1994, PROC SPIE, V2291, P40, DOI 10.1117/12.190929