Nature of the Pbl interface defect in (100)Si/SiO2 as revealed by electron spin resonance 29Si hyperfine structure

被引:11
作者
Stesmans, A [1 ]
Afanas'ev, VV [1 ]
机构
[1] Univ Louvain, Dept Phys, B-3001 Heverlee, Belgium
关键词
D O I
10.1016/S0167-9317(99)00350-0
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Observation by electron spin resonance of the full angular dependence of the hyperfine (hf) interaction spectrum associated with the interfacial P-b1 defect in thermal (100)Si/SiO2 shows that the dominant interaction arises from a single Si-29 atom. The hf tensor displays weakly monoclinic I (nearly axial) symmetry, with the principal axes of the g and hf tensors coinciding. Observation of an identical hf structure consolidates the presence of the P-b1 defect in porous Si. A molecular orbital analysis indicates that the unpaired electron resides for similar to 58% in a single unpaired Si hybrid orbital, found to be 14% s-like and 86% p-like, with the p-orbital pointing closely along a <211> direction at 35.26 degrees with the [100] interface normal. Excluding oxygen as an immediate part of the defect, the results establish the P-b1 core as a tilted (similar to 20 degrees about <011>) Si-3=Si . unit. The moiety is pictured as part of a strained Si-Si dimer near the interface.
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收藏
页码:113 / 116
页数:4
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