Low-loss singlemode amorphous silicon waveguides

被引：82

作者：

Harke, A

Krause, M

Mueller, J

机构：

[1] TU Hamburg Harburg, Dept Microsyst Technol, D-21073 Hamburg, Germany

[2] TU Hamburg Harburg, Dept Opt Commun Technol, D-21073 Hamburg, Germany

来源：

ELECTRONICS LETTERS | 2005年 / 41卷 / 25期

关键词：

D O I：

10.1049/el:20052387

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Amorphous silicon waveguides were obtained by plasma-enhanced chemical vapour deposition and anisotropic plasma etching. Rectangular multimode waveguides as well as singlemode ridge waveguides were fabricated. Scattered light measurements at 1550 nm (1300 nm) wavelength showed a low propagation loss of <= 0.5 dB/cm (1.6 dB/cm) for multimode waveguides and 2.0 dB/cm (5.0 dB/cm) for highlyconfined singlemode waveguides.

引用

收藏

页码：1377 / 1379

页数：3

相关论文

共 11 条

[1] Demonstration of a silicon Raman laser [J].

Boyraz, O ;

Jalali, B .

OPTICS EXPRESS, 2004, 12 (21) :5269-5273

[2] Amorphous silicon-based guided-wave passive and active devices for silicon integrated optoelectronics [J].

Cocorullo, G ;

Della Corte, FG ;

De Rosa, R ;

Rendina, I ;

Rubino, A ;

Terzi, E .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1998, 4 (06) :997-1002

[3] Amorphous silicon waveguides and light modulators for integrated photonics realized by low-temperature plasma-enhanced chemical-vapor deposition [J].

Cocorullo, G ;

DellaCorte, FG ;

Rendina, I ;

Minarini, C ;

Rubino, A ;

Terzini, E .

OPTICS LETTERS, 1996, 21 (24) :2002-2004

[4] Add-drop filters utilizing vertically coupled microdisk resonators in silicon [J].

Koonath, P ;

Indukuri, T ;

Jalali, B .

APPLIED PHYSICS LETTERS, 2005, 86 (09) :1-3

[5] Optical transmission losses in polycrystalline silicon strip waveguides: Effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength [J].

Liao, L ;

Lim, DR ;

Agarwal, AM ;

Duan, XM ;

Lee, KK ;

Kimerling, LC .

JOURNAL OF ELECTRONIC MATERIALS, 2000, 29 (12) :1380-1386

[6] A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor [J].

Liu, AS ;

Jones, R ;

Liao, L ;

Samara-Rubio, D ;

Rubin, D ;

Cohen, O ;

Nicolaescu, R ;

Paniccia, M .

NATURE, 2004, 427 (6975) :615-618

[7]

Mueller J, 2004, AIP CONF PROC, V709, P268, DOI 10.1063/1.1764024

[8]

Pavesi L., 2004, SILICON PHOTONICS, DOI DOI 10.1016/j.apsusc.2014.10.011

[9] Ultralow refractive index substrates-a base for photonic crystal slab waveguides [J].

Schmidt, M ;

Boettger, G ;

Eich, M ;

Morgenroth, W ;

Huebner, U ;

Boucher, R ;

Meyer, HG ;

Konjhodzic, D ;

Bretinger, H ;

Marlow, F .

APPLIED PHYSICS LETTERS, 2004, 85 (01) :16-18

[10] LARGE SINGLE-MODE RIB WAVE-GUIDES IN GESI-SI AND SI-ON-SIO2 [J].

SOREF, RA ;

SCHMIDTCHEN, J ;

PETERMANN, K .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1991, 27 (08) :1971-1974