Add-drop filters utilizing vertically coupled microdisk resonators in silicon

被引：34

作者：

Koonath, P ^{[1
]}

Indukuri, T ^{[1
]}

Jalali, B ^{[1
]}

机构：

[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA

来源：

APPLIED PHYSICS LETTERS | 2005年 / 86卷 / 09期

关键词：

D O I：

10.1063/1.1873064

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Add-drop filters, based on vertically coupled microdisk resonators, have been realized in silicon, using a modified separation by implantation of oxygen process. Buried rib waveguides in the bottom-layer silicon, of a two-layer structure, are coupled to microdisk resonators in the top-layer silicon through a silicon dioxide layer formed by oxygen implantation. The radii of the microdisk structures were varied suitably to obtain resonators with slightly shifted resonance wavelengths. The average adjacent channel crosstalk suppression of these filters exhibits an upper limit of 12.11 dB and a lower limit of 6.2 dB over the wavelength band under consideration. (C) 2005 American Institute of Physics.

引用

页码：1 / 3

页数：3

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