JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
|
1999年
/
17卷
/
03期
关键词:
D O I:
10.1116/1.590746
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
We report on a systematic study of In0.5Ga0.5As quantum dots Grown by the migration enhanced epitaxy technique. A maximum room-temperature luminescence wavelength of 1.37 mu m has been achieved. We observe the presence of two emission maxima, which we attribute to the formation and interaction of two different dot-size distributions. Photoluminescence data analysis shows the formation of large quantum dots with good size uniformity that emit at 1.3 mu m and longer due to the enhanced atomic migration lengths. (C) 1999 American Vacuum Society. [S0734-211X(99)01103-8].