Study of HfO2 films prepared by ion-assisted deposition using a gridless end-hall ion source

被引：98

作者：

Gilo, M

Croitoru, N

机构：

[1] ELOP Electroopt Ind Ltd, IL-76100 Rehovot, Israel

[2] Tel Aviv Univ, Fac Engn, Dept Phys Elect, IL-69978 Tel Aviv, Israel

来源：

THIN SOLID FILMS | 1999年 / 350卷 / 1-2期

关键词：

ion assisted deposition; coatings; HfO2; atomic force microscopy;

D O I：

10.1016/S0040-6090(99)00226-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

HfO2 thin films were deposited using a-beam gun evaporation with ion assisted deposition (IAD) of low energy oxygen ions (40-100 eV) from an end-Hall ion source. A comparison was made using Hf and HfO2 starting materials. The index of refraction was measured as a function of the ion source voltage and compared to results without LAD. Application to high power laser mirrors was verified by measurements of laser damage thresholds at 1.06 mu m. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：203 / 208

页数：6

共 11 条

[1] OPTICAL-PROPERTIES AND ENVIRONMENTAL STABILITY OF OXIDE COATINGS DEPOSITED BY REACTIVE SPUTTERING [J].

EDLOU, SM ;

SMAJKIEWICZ, A ;

ALJUMAILY, GA .

APPLIED OPTICS, 1993, 32 (28) :5601-5605

[2]

FOLTYN SR, 1981, SPIE, V288, P21

[3]

FULTON ML, 1994, P SOC PHOTO-OPT INS, V2253, P374

[4] Properties of TiO2 films prepared by ion-assisted deposition using a gridless end-Hall ion source [J].

Gilo, M ;

Croitoru, N .

THIN SOLID FILMS, 1996, 283 (1-2) :84-89

[5] END-HALL ION-SOURCE [J].

KAUFMAN, HR ;

ROBINSON, RS ;

SEDDON, RI .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2081-2084

[6] STUDY OF SPUTTERED HFO2 THIN-FILMS ON SILICON [J].

KUO, CT ;

KWOR, R ;

JONES, KM .

THIN SOLID FILMS, 1992, 213 (02) :257-264

[7]

MACLEOD HA, 1986, THIN FILM OPTICAL FI, P369

[8]

MCNALLY JJ, 1985, SPIE, V540, P479

[9] Influence of small inhomogeneities on the spectral characteristics of single thin films [J].

Tikhonravov, AV ;

Trubetskov, MK ;

Sullivan, BT ;

Dobrowolski, JA .

APPLIED OPTICS, 1997, 36 (28) :7188-7198

[10] OPTICAL COATINGS DEPOSITED BY REACTIVE ION PLATING [J].

WALDORF, AJ ;

DOBROWOLSKI, JA ;

SULLIVAN, BT ;

PLANTE, LM .

APPLIED OPTICS, 1993, 32 (28) :5583-5593

← 1 2 →