A robust polymer microcable structure for flexible devices

被引：24

作者：

Kim, Eric ^{[1
]}

Tu, Hongen ^{[1
]}

Lv, Cheng ^{[2
]}

Jiang, Hanqing ^{[2
]}

Yu, Hongyu ^{[3
]}

Xu, Yong ^{[1
]}

机构：

[1] Wayne State Univ, Detroit, MI 48202 USA

[2] Arizona State Univ, Sch Engn Matter Transport & Energy, Tempe, AZ 85287 USA

[3] Arizona State Univ, Sch Elect Comp & Energy Engn, Tempe, AZ 85287 USA

来源：

APPLIED PHYSICS LETTERS | 2013年 / 102卷 / 03期

基金：

美国国家科学基金会;

关键词：

THIN-FILM TRANSISTORS; STRESS SENSOR SKIN; LARGE-AREA; PRINTABLE FORM; SILICON; TECHNOLOGY;

D O I：

10.1063/1.4788917

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This letter reports a parylene cable structure that can significantly increase the robustness of flexible devices based on a silicon-island structure. In our previous work, it has been observed that the flexible cables connecting silicon islands could experience stress concentration at the edge of the silicon islands and fracture the metal traces. To address this issue, a micro cushion structure based on parylene micro-channels is proposed to minimize the stress concentration. This structure also improves the overall mechanical strength of the cables, and provides a simple method to encapsulate metal traces reliably. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4788917]

引用

收藏

页数：4

相关论文

共 23 条

[1] Omnidirectional Printing of Flexible, Stretchable, and Spanning Silver Microelectrodes [J].

Ahn, Bok Y. ;

Duoss, Eric B. ;

Motala, Michael J. ;

Guo, Xiaoying ;

Park, Sang-Il ;

Xiong, Yujie ;

Yoon, Jongseung ;

Nuzzo, Ralph G. ;

Rogers, John A. ;

Lewis, Jennifer A. .

SCIENCE, 2009, 323 (5921) :1590-1593

[2] Amorphous silicon air-gap resonators on large-area substrates [J].

Boucinha, M ;

Brogueira, P ;

Chu, V ;

Conde, JP .

APPLIED PHYSICS LETTERS, 2000, 77 (06) :907-909

[3] Flexible large area thin film position sensitive detectors [J].

Fortunato, F ;

Ferreira, I ;

Giuliani, F ;

Martins, R .

SENSORS AND ACTUATORS A-PHYSICAL, 2000, 86 (03) :182-186

[4] Microfabrication of 3D neural probes with combined electrical and chemical interfaces [J].

John, Jessin ;

Li, Yuefa ;

Zhang, Jinsheng ;

Loeb, Jeffrey A. ;

Xu, Yong .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (10)

[5] Parylene cantilevers integrated with polycrystalline silicon piezoresistors for surface stress sensing [J].

Katragadda, Rakesh ;

Wang, Zhuo ;

Khalid, Waqas ;

Li, Yuefa ;

Xu, Yong .

APPLIED PHYSICS LETTERS, 2007, 91 (08)

[6] A novel intelligent textile technology based on silicon flexible skins [J].

Katragadda, Rakesh B. ;

Xu, Yong .

SENSORS AND ACTUATORS A-PHYSICAL, 2008, 143 (01) :169-174

[7] Epidermal Electronics [J].

Kim, Dae-Hyeong ;

Lu, Nanshu ;

Ma, Rui ;

Kim, Yun-Soung ;

Kim, Rak-Hwan ;

Wang, Shuodao ;

Wu, Jian ;

Won, Sang Min ;

Tao, Hu ;

Islam, Ahmad ;

Yu, Ki Jun ;

Kim, Tae-il ;

Chowdhury, Raeed ;

Ying, Ming ;

Xu, Lizhi ;

Li, Ming ;

Chung, Hyun-Joong ;

Keum, Hohyun ;

McCormick, Martin ;

Liu, Ping ;

Zhang, Yong-Wei ;

Omenetto, Fiorenzo G. ;

Huang, Yonggang ;

Coleman, Todd ;

Rogers, John A. .

SCIENCE, 2011, 333 (6044) :838-843

[8]

Kim DH, 2011, NAT MATER, V10, P316, DOI [10.1038/nmat2971, 10.1038/NMAT2971]

[9] All-inkjet-printed flexible electronics fabrication on a polymer substrate by low-temperature high-resolution selective laser sintering of metal nanoparticles [J].

Ko, Seung H. ;

Pan, Heng ;

Grigoropoulos, Costas P. ;

Luscombe, Christine K. ;

Frechet, Jean M. J. ;

Poulikakos, Dimos .

NANOTECHNOLOGY, 2007, 18 (34)

[10] Large-area, selective transfer of microstructured silicon: A printing-based approach to high-performance thin-film transistors supported on flexible substrates [J].

Lee, KJ ;

Motala, MJ ;

Meitl, MA ;

Childs, WR ;

Menard, E ;

Shim, AK ;

Rogers, JA ;

Nuzzo, RG .

ADVANCED MATERIALS, 2005, 17 (19) :2332-+