Structure of the Si(011)-(16x2) surface and hydrogen desorption kinetics investigated using temperature-programmed desorption

被引:19
作者
Kim, H
Taylor, N
Spila, T
Glass, G
Park, SY
Greene, JE
Abelson, JR
机构
[1] UNIV ILLINOIS,DEPT MAT SCI,COORDINATED SCI LAB,URBANA,IL 61801
[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
关键词
adatoms; deuterium; silicon; surface relaxation and reconstruction; thermal desorption spectroscopy;
D O I
10.1016/S0039-6028(96)01587-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
D-2 temperature-programmed desorption (TPD) was used to probe the structure of the Si(011)-(16 x 2) surface. Deuterium was adsorbed at 200 degrees C to coverages theta(D) ranging up to complete saturation (approximately 1.1 ML) and the sample heated at 5 degrees C s(-1). TPD spectra exhibited three second-order desorption peaks labelled beta(2), beta(1)* and beta(1) centered at 430, 520 and 550 degrees C. Of the proposed models for the Si(011)-(16 x 2) reconstruction, the present TPD results as a function of theta(D) provide support for the adatom/dimer model with the beta(2) peak assigned to D-2 desorption from the dihydride phase, while the beta(1)* and beta(1) peaks arise from adatom and surface-atom monohydride phases. (C) 1997 Elsevier Science B.V.
引用
收藏
页码:L496 / L500
页数:5
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