The gas sensing characteristics of ITO thin film prepared by sol-gel method

被引：67

作者：

Jiao, Z ^{[1
]}

Wu, MH ^{[1
]}

Gu, JZ ^{[1
]}

Sun, XL ^{[1
]}

机构：

[1] Shanghai Univ Sci & Technol, Shanghai Appl Radiat Inst, Shanghai 201800, Peoples R China

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2003年 / 94卷 / 02期

关键词：

thin film; sol-gel; gas sensor; ITO;

D O I：

10.1016/S0925-4005(03)00343-5

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

In this paper, indium tin oxide (ITO) thin films were prepared by sol-gel method. The gas sensing properties of ITO thin films were investigated. The ITO thin films have better sensitivity to ethanol and nitrogen dioxide, but have little response to H-2, gasoline, liquid petrol gas (LPG), CH4 and CO, Pd, Pt, CaO, Th2O3 and rare earth elements were added to improve gas sensing characteristics. It was found that the influences of the additives on gas sensing characteristics were slight. The stability of ITO thin films is good. (C) 2003 Published by Elsevier Science B.V.

引用

页码：216 / 221

页数：6

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