A-Si:H/a-SiC:H waveguides and modulators for low-cost silicon-integrated optoelectronics

被引：5

作者：

Cocorullo, G

della Corte, FG

de Rosa, R

Rendina, I

Rubino, A

Terzini, E

机构：

[1] IRECE, Consiglio Nazl Ric, I-80124 Naples, Italy

[2] ENEA, Ctr Ric Portice, I-80055 Naples, Italy

[3] Univ Calabria, DEIS, I-87036 Cosenza, Italy

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1998年 / 227卷

关键词：

D O I：

10.1016/S0022-3093(98)00290-7

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Starting from an a-Si:H/a-SiC:H stack deposited by glow discharge on a crystal silicon wafer, we have fabricated and measured the properties of rib waveguides suitable for infrared optical communication purposes. Propagation losses as small as 0.7 dB/cm have been measured. The same waveguiding structure has been utilised for the construction of Fabry-Perot interferometers. As the process is compatible with the standard microelectronic technologies, the integration of optical and electronic functions on the same chip becomes possible. (C) 1998 Elsevier Science B.V. All rights reserved.

引用

页码：1118 / 1122

页数：5

共 8 条

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