Characterization of hard amorphous carbon films deposited with high-energy ion beams

被引：18

作者：

Pregliasco, RG

Zampieri, G

Huck, H

Halac, EB

deBenyacar, MAR

Righini, R

机构：

[1] COMIS NACL ENERGIA ATOM,CTR ATOM BARILOCHE,RA-8400 SAN CARLOS BARILO,RIO NEGRO,ARGENTINA

[2] COMIS NACL ENERGIA ATOM,INST BALSEIRO,RA-8400 SAN CARLOS BARILO,RIO NEGRO,ARGENTINA

[3] COMIS NACL ENERGIA ATOM,DEPT FIS,RA-1429 BUENOS AIRES,DF,ARGENTINA

[4] UNIV NACL LJUAN,DEPT CIENCIAS BASICAS,RA-6700 LUJAN,ARGENTINA

来源：

APPLIED SURFACE SCIENCE | 1996年 / 103卷 / 03期

关键词：

D O I：

10.1016/0169-4332(96)00475-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We report a characterization of hard amorphous carbon films prepared by a new method: high-energy (ca. 30 keV) bombardment with CH3+ and CH4+ ions. The results of AES and EELS reveal that almost 60% of the atoms are in sp(2) sites and are consistent with the hypothesis that the microscopic structure of the films consists of an intricate network of small amorphous graphite-like sheets connected by sp(3)-rich zones. Raman spectroscopy and SIMS results are also discussed.

引用

收藏

页码：261 / 267

页数：7

相关论文

共 24 条

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].

AISENBERG, S ;

CHABOT, R .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) :2953-+

[2] COMPARISON OF DIAMOND-LIKE COATINGS DEPOSITED WITH C+ AND VARIOUS HYDROCARBON ION-BEAMS [J].

ANTTILA, A ;

KOSKINEN, J ;

LAPPALAINEN, R ;

HIRVONEN, JP ;

STONE, D ;

PASZKIET, C .

APPLIED PHYSICS LETTERS, 1987, 50 (03) :132-134

[3] EELS ANALYSIS OF VACUUM ARC-DEPOSITED DIAMOND-LIKE FILMS [J].

BERGER, SD ;

MCKENZIE, DR ;

MARTIN, PJ .

PHILOSOPHICAL MAGAZINE LETTERS, 1988, 57 (06) :285-290

[4] CHEMICAL-STRUCTURE AND PHYSICAL-PROPERTIES OF DIAMOND-LIKE AMORPHOUS-CARBON FILMS PREPARED BY MAGNETRON SPUTTERING [J].

CHO, NH ;

KRISHNAN, KM ;

VEIRS, DK ;

RUBIN, MD ;

HOPPER, CB ;

BHUSHAN, B ;

BOGY, DB .

JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2543-2554

[5] A SIMPLE-MODEL FOR THE FORMATION OF COMPRESSIVE STRESS IN THIN-FILMS BY ION-BOMBARDMENT [J].

DAVIS, CA .

THIN SOLID FILMS, 1993, 226 (01) :30-34

[6] PROPERTIES OF FILTERED-ION-BEAM-DEPOSITED DIAMOND-LIKE CARBON AS A FUNCTION OF ION ENERGY [J].

FALLON, PJ ;

VEERASAMY, VS ;

DAVIS, CA ;

ROBERTSON, J ;

AMARATUNGA, GAJ ;

MILNE, WI ;

KOSKINEN, J .

PHYSICAL REVIEW B, 1993, 48 (07) :4777-4782

[7] STRUCTURE AND BONDING OF HYDROCARBON PLASMA GENERATED CARBON-FILMS - AN ELECTRON-ENERGY LOSS STUDY [J].

FINK, J ;

MULLERHEINZERLING, T ;

PFLUGER, J ;

BUBENZER, A ;

KOIDL, P ;

CRECELIUS, G .

SOLID STATE COMMUNICATIONS, 1983, 47 (09) :687-691

[8] MASS-SEPARATED ION-BEAM DEPOSITION OF DIAMOND-LIKE THIN-FILMS [J].

HUCK, H ;

JECH, A ;

HALAC, EB ;

NICOLAI, J ;

DEBENYACAR, MAR ;

RIGHINI, R .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 84 (01) :62-66

[9] NEGATIVE-ION SOURCE (NIABNIS) AND PREPARATION OF TRANSPARENT CARBON-FILMS BY NEGATIVE CARBON ION-BEAM DEPOSITION [J].

ISHIKAWA, J ;

OGAWA, K ;

MIYATA, K ;

TSUJI, H ;

TAKAGI, T .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4) :205-208

[10] TRANSPARENT CARBON-FILM PREPARED BY MASS-SEPARATED NEGATIVE-CARBON-ION-BEAM DEPOSITION [J].

ISHIKAWA, J ;

TAKEIRI, Y ;

OGAWA, K ;

TAKAGI, T .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (07) :2509-2515