Nitride-based light-emitting diodes with p-AlInGaN surface layers

被引:31
作者
Kuo, CH [1 ]
Lin, CC
Chang, SJ
Hsu, YP
Tsai, JM
Lai, WC
Wang, PT
机构
[1] Natl Cent Univ, Inst Opt Sci, Chungli 320, Taiwan
[2] Kun Shan Univ, Dept Elect Engn, Tainan 710, Taiwan
[3] Natl Cheng Kung Univ, Inst Microelect, Tainan 70101, Taiwan
[4] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan
[5] S Epitaxy Corp, Tainan 744, Taiwan
[6] Natl Cheng Kung Univ, Inst Electroopt Sci & Engn, Tainan 70101, Taiwan
关键词
InGaN/GaN; light-emitting diode (LED); p-AlInGaN; V-shap pits;
D O I
10.1109/TED.2005.856817
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have prepared bulk p-AlInGaN layers and light-emitting diodes (LEDs) with p-AlInGaN surface layers by metal-organic chemical vapor deposition. By properly control the TNIAI and TMIn flow rates, we could match the lattice constant of p-AlInGaN to that of GaN. It was found that surface of the LED with p-AlInGaN layer was rough with a high density of hexagonal pits. Although the forward voltage of the LED with p-AlInGaN layer was slightly larger, it was found that we can enhance the output power by 54% by using p-AlInGaN surface layer.
引用
收藏
页码:2346 / 2349
页数:4
相关论文
共 17 条
[1]   400-nm InGaN-GaN and InGaN-AlGaN multiquantum well light-emitting diodes [J].
Chang, SJ ;
Kuo, CH ;
Su, YK ;
Wu, LW ;
Sheu, JK ;
Wen, TC ;
Lai, WC ;
Chen, JF ;
Tsai, JM .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (04) :744-748
[2]   Influence of growth temperature and reactor pressure on microstructural and optical properties of InAlGaN quaternary epilayers [J].
Cho, HK ;
Lee, KH ;
Kim, SW ;
Park, KS ;
Cho, YH ;
Lee, JH .
JOURNAL OF CRYSTAL GROWTH, 2004, 267 (1-2) :67-73
[3]   Increase in the extraction efficiency of GaN-based light-emitting diodes via surface roughening [J].
Fujii, T ;
Gao, Y ;
Sharma, R ;
Hu, EL ;
DenBaars, SP ;
Nakamura, S .
APPLIED PHYSICS LETTERS, 2004, 84 (06) :855-857
[4]  
KHIZAR M, 2005, APPL PHYS LETT, V86, P173
[5]   Low temperature activation of Mg-doped GaN in O2 ambient [J].
Kuo, CH ;
Chang, SJ ;
Su, YK ;
Wu, LW ;
Sheu, JK ;
Chen, CH ;
Chi, GC .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2002, 41 (2A) :L112-L114
[6]   InGaN/GaN light emitting diodes activated in O2 ambient [J].
Kuo, CH ;
Chang, SJ ;
Su, YK ;
Chen, JF ;
Wu, LW ;
Sheu, JK ;
Chen, CH ;
Chi, GC .
IEEE ELECTRON DEVICE LETTERS, 2002, 23 (05) :240-242
[7]   InGaN-AlInGaN multiquantum-well LEDs [J].
Lai, WC ;
Chang, SJ ;
Yokoyam, M ;
Sheu, JK ;
Chen, JF .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2001, 13 (06) :559-561
[8]   Investigations on V-defects in quaternary AlInGaN epilayers [J].
Liu, JP ;
Wang, YT ;
Yang, H ;
Jiang, DS ;
Jahn, U ;
Ploog, KH .
APPLIED PHYSICS LETTERS, 2004, 84 (26) :5449-5451
[9]   Characterization of AlInGaN quaternary epilayers grown by metal organic chemical vapor deposition [J].
Liu, W ;
Soh, CB ;
Chen, P ;
Chua, SJ .
JOURNAL OF CRYSTAL GROWTH, 2004, 268 (3-4) :509-514
[10]   High-temperature-grown quaternary AlInGaN epilayers and multiple quantum wells for ultraviolet emission [J].
Liu, Y ;
Egawa, T ;
Ishikawa, H ;
Jiang, H ;
Zhang, BJ ;
Hao, MS ;
Jimbo, T .
JOURNAL OF CRYSTAL GROWTH, 2004, 264 (1-3) :159-164