Thermal and chemical vapor deposition of Si nanowires: Shape control, dispersion, and electrical properties

被引:82
作者
Colli, A. [1 ]
Fasoli, A.
Beecher, P.
Servati, P.
Pisana, S.
Fu, Y.
Flewitt, A. J.
Milne, W. I.
Robertson, J.
Ducati, C.
De Franceschi, S.
Hofmann, S.
Ferrari, A. C.
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB3 0FA, England
[2] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB3 6GF, England
[3] CEA, Lab Transport Elect Quant & Supracond, F-38054 Grenoble 9, France
[4] Univ Cambridge, Dept Engn, Cambridge CB3 0FA, England
基金
英国工程与自然科学研究理事会;
关键词
D O I
10.1063/1.2764050
中图分类号
O59 [应用物理学];
学科分类号
摘要
We investigate and compare complementary approaches to SiNW production in terms of yield, morphology control, and electrical properties. Vapor-phase techniques are considered, including chemical vapor deposition (with or without the assistance of a plasma) and thermal evaporation. We report Au-catalyzed nucleation of SiNWs at temperatures as low as 300 degrees C using SiH4 as precursor. We get yields up to several milligrams by metal-free condensation of SiO powders. For all processes, we control the final nanostructure morphology. We then report concentrated and stable dispersions of SiNWs in solvents compatible with semiconducting organic polymers. Finally, we investigate the electrical response of intrinsic SiNWs grown by different methods. All our SiNWs exhibit p-type behavior and comparable performance, though in some cases ambipolar devices are observed. Thus, processing and morphology, rather than the growth technique, are key to achieve optimal samples for applications. (c) 2007 American Institute of Physics.
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页数:13
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