Nanoscale-resolved subsurface imaging by scattering-type near-field optical microscopy

被引：138

作者：

Taubner, T

Keilmann, F

Hillenbrand, R

机构：

[1] Max Planck Inst Biochem, Nano Photon Grp, D-82152 Martinsried, Germany

[2] Max Planck Inst Biochem, Abt Mol Strukturbiol, D-82152 Martinsried, Germany

[3] Ctr Nanosci, D-82152 Martinsried, Germany

来源：

OPTICS EXPRESS | 2005年 / 13卷 / 22期

关键词：

D O I：

10.1364/OPEX.13.008893

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate that scattering-type scanning near-field optical microscopy (s-SNOM) allows nanoscale-resolved imaging of objects below transparent surface layers at both visible and mid-infrared wavelengths. We show topography-free subsurface imaging at lambda= 633 nm. At lambda= 10.7 mu m, gold islands buried 50 nm below a polymer surface are imaged with a lateral resolution < 120 nm, corresponding to lambda/90. Studying oxide layers with systematically varied thicknesses we provide experimental evidence of mid-infrared near-field probing in depths > 80 nm. (c) 2005 Optical Society of America.

引用

收藏

页码：8893 / 8899

页数：7

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