Nitride-based LEDs fabricated on patterned sapphire substrates

被引:109
作者
Chang, SJ
Lin, YC
Su, YK
Chang, CS
Wen, TC
Shei, SC
Ke, JC
Kuo, CW
Chen, SC
Liu, CH
机构
[1] Natl Cheng Kung Univ, Dept Elect Engn, Inst Microelect, Tainan 70101, Taiwan
[2] S Epitaxy Corp, Hsin Shi 744, Taiwan
[3] Kun Shan Univ Technol, Dept Elect Engn, Yung Kang 710, Taiwan
[4] Natl Yunlin Univ Sci & Techno, Dept Elect Engn, Touliu 640, Taiwan
[5] Nan Jeon Jr Coll Technol & Commerce, Dept Elect Engn, Yan Hsui 737, Taiwan
关键词
patterned sapphire substrate; InGaN/GaN; LED; PL; reliability;
D O I
10.1016/S0038-1101(03)00073-X
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Nitride-based blue LEDs prepared on both patterned and conventional sapphire substrates were both fabricated. It was found that although the EL peak positions of these two LEDs were about the same, the EL intensity of LED grown on patterned sapphire substrate was about 35% larger. The maximum output power of LED grown on patterned sapphire substrate also occurred at higher injection current. The reliability of LED grown on patterned sapphire substrate was also found to be better. There improvements could all be attributed to the reduced dislocation density in the LEDs grown on patterned sapphire substrates. (C) 2003 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:1539 / 1542
页数:4
相关论文
共 27 条
[1]   InGaN-GaN multiquantum-well blue and green light-emitting diodes [J].
Chang, SJ ;
Lai, WC ;
Su, YK ;
Chen, JF ;
Liu, CH ;
Liaw, UH .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (02) :278-283
[2]   400-nm InGaN-GaN and InGaN-AlGaN multiquantum well light-emitting diodes [J].
Chang, SJ ;
Kuo, CH ;
Su, YK ;
Wu, LW ;
Sheu, JK ;
Wen, TC ;
Lai, WC ;
Chen, JF ;
Tsai, JM .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (04) :744-748
[3]   Acceptor activation of Mg-doped GaN by microwave treatment [J].
Chang, SJ ;
Su, YK ;
Tsai, TL ;
Chang, CY ;
Chiang, CL ;
Chang, CS ;
Chen, TP ;
Huang, KH .
APPLIED PHYSICS LETTERS, 2001, 78 (03) :312-313
[4]   Nitride-based cascade near white light-emitting diodes [J].
Chen, CH ;
Chang, SJ ;
Su, YK ;
Sheu, JK ;
Chen, JF ;
Kuo, CH ;
Lin, YC .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2002, 14 (07) :908-910
[5]   High-efficiency InGaN-GaN MQW green light-emitting diodes with CART and DBR structures [J].
Chen, CH ;
Chang, SJ ;
Su, YK ;
Chi, GC ;
Sheu, JK ;
Chen, JF .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (02) :284-288
[6]   High brightness green light emitting diodes with charge asymmetric resonance tunneling structure [J].
Chen, CH ;
Su, YK ;
Chang, SJ ;
Chi, GC ;
Sheu, JK ;
Chen, JF ;
Liu, CH ;
Liaw, YH .
IEEE ELECTRON DEVICE LETTERS, 2002, 23 (03) :130-132
[7]   GaN metal-semiconductor-metal ultraviolet photodetectors with transparent indium-tin-oxide Schottky contacts [J].
Chen, CH ;
Chang, SJ ;
Su, YK ;
Chi, GC ;
Chi, JY ;
Chang, CA ;
Sheu, JK ;
Chen, JF .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2001, 13 (08) :848-850
[8]   Vertical high quality mirrorlike facet of GaN-based device by reactive ion etching [J].
Chen, CHS ;
Chang, SJ ;
Su, YKI ;
Chi, GC ;
Sheu, JK ;
Lin, IC .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (4B) :2762-2764
[9]   Transparent TiN electrodes in GaN metal-semiconductor-metal ultraviolet photodetectors [J].
Chiou, YZ ;
Su, YK ;
Chang, SJ ;
Chen, JF ;
Chang, CS ;
Liu, SH ;
Lin, YC ;
Chen, CH .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (6A) :3643-3645
[10]   P-down InGaN/GaN multiple quantum wells light-emitting diode structure grown by metal-organic vapor-phase epitaxy [J].
Ko, CH ;
Su, YK ;
Chang, SJ ;
Kuan, TM ;
Chiang, CI ;
Lan, WH ;
Lin, WJ ;
Webb, J .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (4B) :2489-2492