Direct nanoprinting by liquid-bridge-mediated nanotransfer moulding

被引：159

作者：

Hwang, Jae K. ^{[1
]}

Cho, Sangho ^{[1
]}

Dang, Jeong M. ^{[1
]}

Kwak, Eun B. ^{[1
]}

Song, Keunkyu ^{[2
]}

Moon, Jooho ^{[2
]}

Sung, Myung M. ^{[1
]}

机构：

[1] Hanyang Univ, Dept Chem, Seoul 133791, South Korea

[2] Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South Korea

来源：

NATURE NANOTECHNOLOGY | 2010年 / 5卷 / 10期

基金：

新加坡国家研究基金会;

关键词：

CAPILLARY FORCE LITHOGRAPHY; NANOIMPRINT LITHOGRAPHY; FABRICATION; MICROSTRUCTURES; PARAMETERS; MONOLAYERS; PENTACENE; SURFACES; MEMS;

D O I：

10.1038/nnano.2010.175

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Several techniques for the direct printing of functional materials have been developed to fabricate micro-and nanoscale structures and devices. We report a new direct patterning method, liquid-bridge-mediated nanotransfer moulding, for the formation of two- or three-dimensional structures with feature sizes as small as tens of nanometres over large areas up to 4 inches across. Liquid-bridge-mediated nanotransfer moulding is based on the direct transfer of various materials from a mould to a substrate through a liquid bridge between them. We demonstrate its usefulness by fabricating nanowire field-effect transistors and arrays of pentacene thin-film transistors.

引用

页码：742 / 748

页数：7

共 56 条

[51]

2-P

[52] The direct nano-patterning of ZnO using nanoimprint lithography with ZnO-sol and thermal annealing [J].