Direct Transfer of Magnetic Sensor Devices to Elastomeric Supports for Stretchable Electronics

被引:76
作者
Melzer, Michael [1 ]
Karnaushenko, Daniil [1 ]
Lin, Gungun [1 ]
Baunack, Stefan [1 ]
Makarov, Denys [1 ]
Schmidt, Oliver G. [1 ,2 ,3 ]
机构
[1] IFW Dresden, Inst Solid State & Mat Res Dresden, Inst Integrat Nanosci, D-01069 Dresden, Germany
[2] Tech Univ Chemnitz, D-09107 Chemnitz, Germany
[3] Tech Univ Dresden, Ctr Adv Elect Dresden, D-01062 Dresden, Germany
基金
欧洲研究理事会;
关键词
ULTRATHIN; BATTERIES;
D O I
10.1002/adma.201403998
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A novel fabrication method for stretchable magnetoresistive sensors is introduced, which allows the transfer of a complex microsensor systems prepared on common rigid donor substrates to prestretched elastomeric membranes in a single step. This direct transfer printing method boosts the fabrication potential of stretchable magnetoelectronics in terms of miniaturization and level of complexity, and provides strain-invariant sensors up to 30% tensile deformation.
引用
收藏
页码:1333 / +
页数:7
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