Comparative study of n-MgZnO/p-Si ultraviolet-B photodetector performance with different device structures

被引:48
作者
Hou, Y. N. [1 ]
Mei, Z. X. [1 ]
Liang, H. L. [1 ]
Ye, D. Q. [1 ]
Liang, S. [1 ]
Gu, C. Z. [1 ]
Du, X. L. [1 ]
机构
[1] Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China
基金
美国国家科学基金会;
关键词
BEAM EPITAXIAL-GROWTH; UV-DETECTOR; ZNO; FILMS; FABRICATION; MGXZN1-XO; SAPPHIRE; ARRAYS; BLIND;
D O I
10.1063/1.3600789
中图分类号
O59 [应用物理学];
学科分类号
摘要
A comparative study of n-MgZnO/p-Si UV-B photodetector performance was carried out with different device structures. The experimental results demonstrate superior photoresponse characteristics of the p-n heterojunction detector against the Schottky type metal-semiconductor-metal counterpart, including a sharper cutoff wavelength at 300 nm, a larger peak photoresponsivity of 1 A/W, and a faster response speed. The role of built-in field and low interface scattering in p-n heterojunction is explored, and the energy band diagram of n-MgZnO/p-Si is employed to interpret the efficient suppression of visible light photoresponse from Si substrate, revealing the applicability of this heterostructure in fabrication of deep ultraviolet detectors. (C) 2011 American Institute of Physics. [doi:10.1063/1.3600789]
引用
收藏
页数:3
相关论文
共 27 条
[11]   Molecular beam epitaxial growth of wide bandgap ZnMgO alloy films on (111)-oriented Si substrate toward UV-detector applications [J].
Koike, K ;
Hama, K ;
Nakashima, I ;
Takada, G ;
Ogata, K ;
Sasa, S ;
Inoue, M ;
Yano, M .
JOURNAL OF CRYSTAL GROWTH, 2005, 278 (1-4) :288-292
[12]   Simple fabrication of a ZnO nanowire photodetector with a fast photoresponse time [J].
Law, JBK ;
Thong, JTL .
APPLIED PHYSICS LETTERS, 2006, 88 (13)
[13]   Spectral response tuning and realization of quasi-solar-blind detection in organic ultraviolet photodetectors [J].
Li, Hai-guo ;
Wu, Gang ;
Chen, Hong-Zheng ;
Wang, Mang .
ORGANIC ELECTRONICS, 2011, 12 (01) :70-77
[14]   Interface engineering of high-Mg-content MgZnO/BeO/Si for p-n heterojunction solar-blind ultraviolet photodetectors [J].
Liang, H. L. ;
Mei, Z. X. ;
Zhang, Q. H. ;
Gu, L. ;
Liang, S. ;
Hou, Y. N. ;
Ye, D. Q. ;
Gu, C. Z. ;
Yu, R. C. ;
Du, X. L. .
APPLIED PHYSICS LETTERS, 2011, 98 (22)
[15]   Solar-blind 4.55 eV band gap Mg0.55Zn0.45O components fabricated using quasi-homo buffers [J].
Liu, Z. L. ;
Mei, Z. X. ;
Zhang, T. C. ;
Liu, Y. P. ;
Guo, Y. ;
Du, X. L. ;
Hallen, A. ;
Zhu, J. J. ;
Kuznetsov, A. Yu. .
JOURNAL OF CRYSTAL GROWTH, 2009, 311 (18) :4356-4359
[16]   Structure and optical properties of ZnO/Mg0.2Zn0.8O superlattices [J].
Ohtomo, A ;
Kawasaki, M ;
Ohkubo, I ;
Koinuma, H ;
Yasuda, T ;
Segawa, Y .
APPLIED PHYSICS LETTERS, 1999, 75 (07) :980-982
[17]   Monolithic multichannel ultraviolet detector arrays and continuous phase evolution in MgxZn1-xO composition spreads [J].
Takeuchi, I ;
Yang, W ;
Chang, KS ;
Aronova, MA ;
Venkatesan, T ;
Vispute, RD ;
Bendersky, LA .
JOURNAL OF APPLIED PHYSICS, 2003, 94 (11) :7336-7340
[18]   Quantum Hall effect in polar oxide heterostructures [J].
Tsukazaki, A. ;
Ohtomo, A. ;
Kita, T. ;
Ohno, Y. ;
Ohno, H. ;
Kawasaki, M. .
SCIENCE, 2007, 315 (5817) :1388-1391
[19]   Repeated temperature modulation epitaxy for p-type doping and light-emitting diode based on ZnO [J].
Tsukazaki, A ;
Ohtomo, A ;
Onuma, T ;
Ohtani, M ;
Makino, T ;
Sumiya, M ;
Ohtani, K ;
Chichibu, SF ;
Fuke, S ;
Segawa, Y ;
Ohno, H ;
Koinuma, H ;
Kawasaki, M .
NATURE MATERIALS, 2005, 4 (01) :42-46
[20]   Evidence of the Zn vacancy acting as the dominant acceptor in n-type ZnO -: art. no. 205502 [J].
Tuomisto, F ;
Ranki, V ;
Saarinen, K ;
Look, DC .
PHYSICAL REVIEW LETTERS, 2003, 91 (20)