Fabrication and field emission properties of poly-diamond films

被引：1

作者：

Ju, BK ^{[1
]}

Lee, YH ^{[1
]}

Oh, MH ^{[1
]}

机构：

[1] Korea Inst Sci & Technol, Elect Mat & Devices Res Ctr, Seoul 130650, South Korea

来源：

MICROELECTRONICS JOURNAL | 1998年 / 29卷 / 11期

关键词：

field emission; diamond; film;

D O I：

10.1016/S0026-2692(98)00018-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

By using a substrate transferring technique, poly-diamond thick films having a smooth or rough surface could be fabricated as field emitter materials. The diamond film with a smooth surface, which was transferred from the interface between the (100) Si substrate and poly diamond deposited by plasma-enhanced CVD, showed better field emission properties in terms of emission current density with improved vacuum level dependence as compared with original poly-diamond film from a rough surface. (C) 1998 Elsevier Science Ltd. All rights reserved.

引用

页码：855 / 859

页数：5

共 9 条

[1]

ASANO T, 1994, P IVMC 94, P100

[2]

CHUNG B, 1996, J PHYS IV, V6, pC585

[3]

DAVIS R, 1993, DIAMOND FILMS COATIN

[4]

Jung JH, 1997, IEEE ELECTR DEVICE L, V18, P197, DOI 10.1109/55.568760

[5] Emission characteristic of diamond-tip field emitter arrays fabricated by transfer mold technique [J].

Kim, S ;

Ju, BK ;

Lee, YH ;

Park, BS ;

Baik, YJ ;

Lim, S ;

Oh, MH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (02) :499-502

[6] Fabrication and characterization of diamond-like carbon coated knife edge field emitter array [J].

Ko, CG ;

Ju, BK ;

Lee, YH ;

Park, JH ;

Oh, MH .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1996, 35 (10A) :L1305-L1307

[7] Fabrication and field emission study of gated diamondlike-carbon-coated silicon tips [J].

Lee, S ;

Ju, BK ;

Lee, YH ;

Jeon, D ;

Oh, MH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (02) :425-427

[8]

NAKAMOTO M, 1994, P 7 INT VAC MICR C G, P41

[9] Field emission properties of ta-C films with nitrogen doping [J].

Park, KC ;

Moon, JH ;

Chung, SJ ;

Jung, JH ;

Ju, BK ;

Oh, MH ;

Milne, WI ;

Han, MK ;

Jang, J .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (02) :431-433

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