Growth of dilute GaNSb by plasma-assisted MBE

被引:30
作者
Buckle, L
Bennett, BR
Jollands, S
Veal, TD
Wilson, NR
Murdin, BN
McConville, CF
Ashley, T
机构
[1] QinetiQ Ltd, Malvern WR14 3PS, Worcs, England
[2] Univ Warwick, Dept Phys, Coventry CV4 7AL, W Midlands, England
[3] Univ Surrey, Dept Phys, Guildford GU2 7XH, Surrey, England
基金
英国工程与自然科学研究理事会;
关键词
doping; X-ray diffraction; molecular beam epitaxy; antimonides; semiconducting III-V materials; semiconducting gallium compounds;
D O I
10.1016/j.jcrysgro.2004.12.148
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Using plasma-assisted molecular beam epitaxy (MBE), GaNxSb1-x films have been grown onto GaSb and GaAs substrates over a range of growth temperatures (310-460° C). The films showed excellent crystalline quality and a nitrogen incorporation of 0-1.75% measured by X-ray diffraction. These materials should enable access to wavelengths in the 2-4 μ m range. © 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:188 / 192
页数:5
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