Are diamonds a MEMS' best friend?

RF microelectromechanical/nanoelectromechanical devices (RF MEMS/NEMS) such as resonators and switches have been proved attractive for the next-generation military and communication systems. Most NEMS/MEMS devices are based on silicon because of the available surface-machining technology adapted from silicon based microelectronics batch fabrication technology. Diamonds provide properties that would potentially enhance the performance of the switches that include tribological and mechanical properties, as well as the low-trap characteristics and capability to tailor the conductivity of diamond films. The fabrication of the diamond-based RF MEMS/NEMS devices require the growth of smooth diamond films with uniform thickness, nanostructure, and properties over large area substrates. Thin-film deposition methods based on microwave plasma enhanced chemical vapor deposition (MPCVD) with hydrogen rich chemistry produce microcrystalline diamond films.