UV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask

被引：20

作者：

Yu, WX ^{[1
]}

Yuan, XC ^{[1
]}

机构：

[1] Nanyang Technol Univ, Photon Res Ctr, Sch Elect & Elect Engn, Singapore 639798, Singapore

来源：

OPTICS EXPRESS | 2003年 / 11卷 / 18期

关键词：

D O I：

10.1364/OE.11.002253

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report a simple method for forming surface corrugation of microlenses based on a volume growth effect of sol-gel glass. The volume growth effect was fully calibrated with a high-energy beam-sensitive grayscale mask, where the amount of growth was determined as a function of electron- beam-induced optical densities in the mask. This technique provides an excellent surface smoothness compared with other development based fabrication techniques. For example, a refractive microlens with a diameter of 140 mum and a sag height of 2.13 mum was demonstrated. (C) 2003 Optical Society of America.

引用

页码：2253 / 2258

页数：6

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