Innovative aspects in thin film technologies for nanostructured materials in gas sensor devices

被引：27

作者：

Taurino, AM

Epifani, M

Toccoli, T

Iannotta, S

Siciliano, P

机构：

[1] CNR, IMM, Sez Lecce, I-73100 Lecce, Italy

[2] CNR, IFN, Sez Trento, I-38050 Trento, Italy

来源：

THIN SOLID FILMS | 2003年 / 436卷 / 01期

关键词：

sol-gel; supersonic cluster beam deposition; nano-structure;

D O I：

10.1016/S0040-6090(03)00525-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This work reports on the use of two innovative techniques in the field of gas sensors for preparing nano-structured materials: sol-gel and supersonic cluster beam deposition. By means of sol-gel, nano-structured In2O3 thin films have been prepared and deposited under different deposition parameters on silicon wafer. In this way the results have shown a good compatibility of the method with silicon technology, then potentially suitable to be used in the fabrication of integrated devices. The second technique has been applied for the preparation of nano-structured TiO2 thin films showing its capability to be used in the fabrication of gas sensor devices, mainly when a good control of the grain dimension is required. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

收藏

页码：52 / 63

页数：12

相关论文

共 18 条

[1] Scheler's critique of Kant's ethics [J].

Barber, M .

CONTINENTAL PHILOSOPHY REVIEW, 1999, 32 (01) :105-110

[2] Synthesis of carbon films with controlled nanostructure by separation of neutral clusters in supersonic beams [J].

Barborini, E ;

Piseri, P ;

Li Bassi, A ;

Ferrari, AC ;

Bottani, CE ;

Milani, P .

CHEMICAL PHYSICS LETTERS, 1999, 300 (5-6) :633-638

[3] Synthesis of nanocrystalline TiNi thin films by cluster beam deposition [J].

Barborini, E ;

Piseri, P ;

Mutti, S ;

Milani, P ;

Biasioli, F ;

Iannotta, S ;

Gialanella, S .

NANOSTRUCTURED MATERIALS, 1998, 10 (06) :1023-1031

[4] Pd-doped SnO2 thin films deposited by assisted ultrasonic spraying CVD for gas sensing:: selectivity and effect of annealing [J].

Briand, D ;

Labeau, M ;

Currie, JF ;

Delabouglise, G .

SENSORS AND ACTUATORS B-CHEMICAL, 1998, 48 (1-3) :395-402

[5] Electrical conduction in nanostructured carbon films produced by supersonic cluster beam deposition [J].

Bruzzi, M ;

Piseri, P ;

Barborini, E ;

Benedek, G ;

Milani, P .

DIAMOND AND RELATED MATERIALS, 2001, 10 (3-7) :989-992

[6] CHARACTERISTICS OF SEMICONDUCTOR GAS SENSORS .1. STEADY-STATE GAS RESPONSE [J].

CLIFFORD, PK ;

TUMA, DT .

SENSORS AND ACTUATORS, 1983, 3 (03) :233-254

[7]

EPIFANI M, 2002, IN PRESS J SOL GEL S

[8] Structural characterization of Nb-TiO2 nanosized thick-films for gas sensing application [J].

Ferroni, M ;

Carotta, MC ;

Guidi, V ;

Martinelli, G ;

Ronconi, F ;

Richard, O ;

Van Dyck, D ;

Van Landuyt, J .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 68 (1-3) :140-145

[9] TiO2 thin films by a novel sol-gel processing for gas sensor applications [J].

Garzella, C ;

Comini, E ;

Tempesti, E ;

Frigeri, C ;

Sberveglieri, G .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 68 (1-3) :189-196

[10]

HABERLAND H, 1998, J VAC SCI TECHNOL, V10, P3266