High quality AlSb bulk material on Si substrates using a monolithic self-assembled quantum dot nucleation layer

被引:14
作者
Balakrishnan, G [1 ]
Huang, S [1 ]
Khoshakhlagh, A [1 ]
Dawson, LR [1 ]
Xin, YC [1 ]
Conlin, P [1 ]
Huffaker, DL [1 ]
机构
[1] Univ New Mexico, Ctr High Technol Mat, Albuquerque, NM 87106 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2005年 / 23卷 / 03期
关键词
D O I
10.1116/1.1924424
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report and characterize the growth of defect-free AlSb bulk material on Si (001) substrates using a monolithic self-assembled AlSb quantum dot (QD) nucleation layer. During the first few monolayers of AlSb growth on Si, highly crystalline QDs form. With continued deposition, the islands coalesce into a planar material with no detectable defects. The QD nucleation layer facilitates a completely relaxed AlSb within similar to 100 ML of deposition according to x-ray diffraction. We attribute the success of AlSb growth on Si to both the large AlSb/Si lattice mismatch (Delta a(0)/a(0)=13.5%) in combination with the strong AlSb atomic bond. We also demonstrate room temperature photoluminescence from an InGaSb QW grown on the AlSb bulk layer. (c) 2005 American Vacuum Society.
引用
收藏
页码:1010 / 1012
页数:3
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