γ-LiAlO2 single crystal:: a novel substrate for GaN epitaxy

被引:66
作者
Xu, K [1 ]
Xu, J [1 ]
Deng, PZ [1 ]
Zhou, YZ [1 ]
Zhou, GQ [1 ]
Qiu, RS [1 ]
Fang, ZJ [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
关键词
crystal growth; epitaxy; GaN; LiAlO2; substrate; defect;
D O I
10.1016/S0022-0248(98)00469-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
gamma-LiAlO2 single crystals were expected to act as a promising substrate material for the epitaxy of GaN, the lattice mismatch between LiAlO2 and GaN is only 1.4%. In the present work, gamma-LiAlO2 single crystal has been grown using temperature gradient technique (TGT), in which a crucible with a cover was used to prevent the component of charge from vaporizing. The crystal quality was characterized by chemical etching, optical microscope, and high-resolution X-ray diffraction. The LiAlO2 crystal grown by TGT was free from bubbles and inclusions, and the dislocation density measured on (1 0 0) crystal plane was about (3.8-6.0) x 10(4) cm(-2). The main defects were subgrains or mosaic structures, which may be caused by the fluctuation of temperature field in the furnace. Growth of GaN on LiAlO2(1 0 0) was tried through MOCVD using H-2 as a carrier, the results showed that LiAlO2 substrate was stable enough to stand the high-temperature reductive atmosphere. Since the lattice mismatching between film and substrate was greatly decreased, single-oriented GaN film can be grown on LiAlO2 substrates without using low-temperature buffer layers. (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:127 / 132
页数:6
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