Observation of photoluminescence from Al1-xInxN heteroepitaxial films grown by metalorganic vapor phase epitaxy

被引:32
作者
Yamaguchi, S [1 ]
Kariya, M [1 ]
Nitta, S [1 ]
Takeuchi, T [1 ]
Wetzel, C [1 ]
Amano, H [1 ]
Akasaki, I [1 ]
机构
[1] Meijo Univ, Dept Elect & Elect Engn, Tempaku Ku, Nagoya, Aichi 468, Japan
关键词
D O I
10.1063/1.122015
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have observed photoluminescence of Al1-xInxN films. The films were grown on GaN by atmospheric pressure metalorganic vapor phase epitaxy. GaV was grown on a c-plane sapphire substrate with a low-temperature deposited ALN buffer layer. Photoluminescence, absorption, and x-ray diffraction measurements have shown that each spectral peak shifts with alloy composition x and that Al1-xInxN heteroepitaxial films are not macroscopically in phase separation and are constituted in the wurzite structure. (C) 1998 American Institute of Physics.
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页码:830 / 831
页数:2
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