Comparison of CO-gas sensing characteristics between mono- and multi-layer Pt/SnO2 thin films

被引：21

作者：

Kim, DH ^{[1
]}

Lee, SH ^{[1
]}

Kim, KH ^{[1
]}

机构：

[1] Pusan Natl Univ, Dept Inorgan Mat Engn, Pusan 609735, South Korea

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2001年 / 77卷 / 1-2期

基金：

英国工程与自然科学研究理事会;

关键词：

Pt catalyst; SnO2; film; multi-layer; gas-sensor; CO gas;

D O I：

10.1016/S0925-4005(01)00749-3

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Sensing characteristics of Pt/SnO2 thin composite films to CO gas were investigated. The composite films were fabricated by rf magnetron sputtering technique. Surface morphology of Pt/SnO2 film was modified to improve its sensitivity to CO gas. The SnO2 films on which Pt was deposited for 12 s showed the maximum sensitivity (R-air/R-CO = 1.23 to CO gas of 200 ppm) at the sensor operation temperature of 175 degreesC. To increase the sensitivity higher, multi-layer Pt/SnO2 films was suggested in this work. The multi-layer Pt/SnO2 film was prepared by depositing SnO2 and Pt cluster layers again on the mono-layer Pt (12 s)/SnO2 film. Compared with SnO2 films on which only one Pt layer deposited, multi-layer films exhibited remarkable improvement of sensitivity to CO gas (R-air/R-CO = 1.72 to CO gas of 200 ppm). The increase of the interface area between Pt and SnO2 was reasoned for the superior GO-sensitivity of the multi-layer film. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：427 / 431

页数：5

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