共 21 条
- [15] SUBMICRON PATTERNING OF THIN COBALT FILMS FOR MAGNETIC STORAGE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (06): : 3196 - 3201
- [17] Study of large area high density magnetic dot arrays fabricated using synchrotron radiation based x-ray lithography [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06): : 2787 - 2791
- [18] Fabrication of sub-0.5 mu m diameter cobalt dots on silicon substrates and photoresist pedestals on 50cmx50cm glass substrates using laser interference lithography [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (03): : 2005 - 2007