Low propagation losses of an Er:Y2O3 planar waveguide grown by alternate-target pulsed laser deposition

被引:72
作者
Korzenski, MB [1 ]
Lecoeur, P
Mercey, B
Camy, P
Doualan, JL
机构
[1] ISMRA, Lab CRISMAT, CNRS, UMR 6508, F-14050 Caen, France
[2] Univ Caen, F-14050 Caen, France
[3] ISMRA, CNRS, Lab Mixte CEA, CIRIL, F-14050 Caen, France
关键词
D O I
10.1063/1.1347026
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on waveguiding properties in epitaxial Er:Y2O3 films grown by pulsed-laser deposition on sapphire [0001] substrate. Characterization of the as-grown films by x-ray diffraction, atomic force microscopy, and Rutherford backscattering revealed that the films were highly crystalline and textured along the [111] direction and possessed an average surface roughness of 2 nm for a 0.69-mum-thick film. The investigation of the emission spectra confirms the proper structural position for the Er3+ ions in the Y2O3 matrix and that the films guide optical waves along the entire length (5 mm) of the film yielding a propagation loss of <1 dB/cm at 800 nm. (C) 2001 American Institute of Physics.
引用
收藏
页码:1210 / 1212
页数:3
相关论文
共 16 条
[1]  
BEUKEMA M, 1997, P ECIO, V97, P397
[2]   Luminescence behavior of pulsed laser deposited Eu:Y2O3 thin film phosphors on sapphire substrates [J].
Cho, KG ;
Kumar, D ;
Holloway, PH ;
Singh, RK .
APPLIED PHYSICS LETTERS, 1998, 73 (21) :3058-3060
[3]   Temperature dependence of the properties of heteroepitaxial Y2O3 films grown on Si by ion assisted evaporation [J].
Cho, MH ;
Ko, DH ;
Jeong, K ;
Lyo, IW ;
Whangbo, SW ;
Kim, HB ;
Choi, SC ;
Song, JH ;
Cho, SJ ;
Whang, CN .
JOURNAL OF APPLIED PHYSICS, 1999, 86 (01) :198-204
[4]   HETEROEPITAXIAL GROWTH OF Y2O3 FILMS ON SILICON [J].
FUKUMOTO, H ;
IMURA, T ;
OSAKA, Y .
APPLIED PHYSICS LETTERS, 1989, 55 (04) :360-361
[5]   STUDY OF THERMALLY OXIDIZED YTTRIUM FILMS ON SILICON [J].
GURVITCH, M ;
MANCHANDA, L ;
GIBSON, JM .
APPLIED PHYSICS LETTERS, 1987, 51 (12) :919-921
[6]   SPUTTER-DEPOSITED ERBIUM-DOPED Y2O3 ACTIVE OPTICAL WAVE-GUIDES [J].
HOEKSTRA, TH ;
LAMBECK, PV ;
ALBERS, H ;
POPMA, TJA .
ELECTRONICS LETTERS, 1993, 29 (07) :581-583
[7]   Growth by laser ablation of Y2O3 and Tm:Y2O3 thin films for optical applications [J].
Huignard, A ;
Aron, A ;
Aschehoug, P ;
Viana, B ;
Théry, J ;
Laurent, A ;
Perrière, J .
JOURNAL OF MATERIALS CHEMISTRY, 2000, 10 (02) :549-554
[8]   Luminescence of pulsed laser deposited Eu doped yttrium oxide films [J].
Jones, SL ;
Kumar, D ;
Singh, RK ;
Holloway, PH .
APPLIED PHYSICS LETTERS, 1997, 71 (03) :404-406
[9]   SPECTRUM OF ER3PLUS IN SINGLE CRYSTALS OF Y2O3 [J].
KISLIUK, P ;
KRUPKE, WF .
JOURNAL OF CHEMICAL PHYSICS, 1964, 40 (12) :3606-&
[10]   PLD-grown Y2O3 thin films from Y metal:: An advantageous alternative to films deposited from yttria [J].
Korzenski, MB ;
Lecoeur, P ;
Mercey, B ;
Chippaux, D ;
Raveau, B ;
Desfeux, R .
CHEMISTRY OF MATERIALS, 2000, 12 (10) :3139-3150