Quantitative analysis of the molding of nanostructures

被引：37

作者：

Schift, H ^{[1
]}

David, C

Gobrecht, J

D'Amore, A

Simoneta, D

Kaiser, W

Gabriel, M

机构：

[1] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland

[2] Kunststoff Ausbildungs & Technol Zentrum, CH-5000 Aarau, Switzerland

[3] AWM Werkzeugbau, CH-5630 Muri AG, Switzerland

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2000年 / 18卷 / 06期

关键词：

D O I：

10.1116/1.1324622

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Mass fabrication processes such as injection molding and hot embossing are highly suitable for the replication of micro- and nanostructures. They require thermoplastic polymers with good molding properties at moderate process temperatures. We show a quantitative approach to the analysis of the molding properties of polymers in the nanorange in which the parameters are most important for achieving good replication fidelity. With this information we were able to fabricate high precision calibration chips for scanning probe microscopes. (C) 2000 American Vacuum Society. [S0734-211X(00)16506-0].

引用

页码：3564 / 3568

页数：5

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