共 185 条
[62]
Inductively coupled plasma reactive ion etching of AlxGa1-xN for application in laser facet formation
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1999, 17 (06)
:2750-2754
[63]
Pulsed laser deposition of ZnO thin films on silicon and sapphire
[J].
LASER PROCESSING OF ADVANCED MATERIALS AND LASER MICROTECHNOLOGIES,
2003, 5121
:317-324
[65]
Inductively coupled plasma reactive ion etching of ZnO using BCI3-based plasmas
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2003, 21 (04)
:1273-1277
[67]
Thermally stable and low resistance Ru ohmic contacts to n-ZnO
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS,
2002, 41 (5B)
:L546-L548
[70]
Photoluminescence and heteroepitaxy of ZnO on sapphire substrate (0001) grown by rf magnetron sputtering
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
2000, 18 (06)
:2864-2868