ZnO thin films and light-emitting diodes

被引:192
作者
Hwang, Dae-Kue [1 ]
Oh, Min-Suk [1 ]
Lim, Jae-Hong [1 ]
Park, Seong-Ju [1 ]
机构
[1] Gwangju Inst Sci & Technol, Dept Mat Sci & Engn, Kwangju 500712, South Korea
关键词
D O I
10.1088/0022-3727/40/22/R01
中图分类号
O59 [应用物理学];
学科分类号
摘要
ZnO is attracting considerable attention for its possible application to light-emitting sources due to its advantages over GaN. We review the recent progress in the growth of ZnO epitaxial films, doping control, device fabrication processes including etching and ohmic contact formation, and finally the prospects for fabrication and characteristics of ZnO light-emitting diodes.
引用
收藏
页码:R387 / R412
页数:26
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