A ZnO nanowire vacuum pressure sensor

被引：51

作者：

Chang, Shoou-Jinn ^{[1
,2
]}

Hsueh, Ting-Jen ^{[1
,2
]}

Hsu, Cheng-Liang ^{[3
]}

Lin, Yan-Ru ^{[4
]}

Chen, I-Cherng ^{[5
]}

Huang, Bohr-Ran ^{[6
]}

机构：

[1] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 70101, Taiwan

[2] Natl Cheng Kung Univ, Dept Elect Engn, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Tainan 70101, Taiwan

[3] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan

[4] Mingchi Univ Technol, Dept Mat Engn, Taipei 243, Taiwan

[5] Ind Technol Res Inst S, Micro Syst Technol Ctr, Tainan 709, Taiwan

[6] Natl Taiwan Univ Sci & Technol, Grad Inst Electroopt Engn, Dept Elect Engn, Taipei 106, Taiwan

来源：

NANOTECHNOLOGY | 2008年 / 19卷 / 09期

关键词：

D O I：

10.1088/0957-4484/19/9/095505

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this study, we report the growth and characterization of lateral ZnO nanowires (NWs) on ZnO: Ga/glass templates. Using x-ray diffraction and micro-Raman spectroscopy, it was found that crystal quality of the as-grown ZnO NWs is good. It was also found that the average length and average diameter of the laterally grown ZnO NWs were 5 mu m and 30 nm, respectively. A vacuum pressure sensor was then fabricated using a single NW bridging across two electrodes. By measuring the current-voltage characteristics of the samples at low pressure, we found that the currents were of 17, 34.28, 57.37 and 96.06 nA for the ZnO NW measured at 1 x 10(-3) Torr, 1 x 10(-4) Torr, 3 x 10(-5) Torr and 5 x 10(-6) Torr, respectively. These values suggest that the laterally grown ZnO NWs prepared in this study are potentially useful for vacuum pressure sensing.

引用

页数：4

共 24 条

[1] Micromachined twin gas sensor for CO and O2 quantification based on catalytically modified nano-SnO2 [J].