Surface electronic structure of plasma-treated indium tin oxides

X-ray photoelectron spectroscopy (XPS) has been used to study the electronic structures of indium tin oxide (ITO) surfaces treated by O+, Ar+, and NHx+ plasmas. The XPS data show that there is a significant change in core level energies (In 3d(5/2) O 1s, and Sn 3d(5/2)), in donor concentration (Sn4+), in valence band maximums (VBM), and in work functions on ITO surfaces being treated by O+ and NHx+ plasmas, compared with that of virgin and Ar+ plasma treated surfaces. Based on these experimental data, a surface band-bending theory is proposed. The theory explains that when Fermi energy of the plasma-treated surface is shifted towards the middle of the band gap: core levels will shift their energies to lower binding energies, VBM will bend upward, and work function will increase, as observed. (C) 2001 American Institute of Physics.