Composition, chemical bonding and mechanical properties of magnetron sputtered CNx thin films at different substrate bias

被引：12

作者：

Gioti, M ^{[1
]}

Logothetidis, S ^{[1
]}

Charitidis, C ^{[1
]}

Lefakis, H ^{[1
]}

机构：

[1] Aristotelian Univ Salonika, Dept Phys, Solid State Phys Sect, GR-54006 Salonika, Greece

来源：

VACUUM | 1999年 / 53卷 / 1-2期

关键词：

carbon nitride films; sputtering; FTIR spectroscopic ellipsometry; elastic properties;

D O I：

10.1016/S0042-207X(98)00421-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nitrogenated amorphous carbon films (a-CNx) were prepared by reactive magnetron sputtering at room temperature with different substrate bias voltage (V-b) and N concentration in the plasma. In situ spectroscopic ellipsometry (SE) data analysis was used to monitor the composition and the film thickness as well as to study the optical properties. The negative V-b was found to affect the film composition by favoring the formation of sp(2) bond. The chemical bonding in the films was identified by the new Fourier transform IR SE technique. The elastic properties of a-CNx films were also examined and the results suggest a predominately elastic behavior for films deposited with negative V-b. In addition, stress measurements conducted during thermal annealing up to 300 degrees C, provide the stability of a-CNx films grown with negative V-b. (C) 1999 Elsevier Science Ltd. All rights reserved.

引用

页码：53 / 56

页数：4

共 12 条

[1] OPTICAL-PROPERTIES OF THIN-FILMS [J].

ASPNES, DE .

THIN SOLID FILMS, 1982, 89 (03) :249-262

[2] Ab initio calculations of the pressure-induced structural phase transitions for four II-VI compounds [J].

Cote, M ;

Zakharov, O ;

Rubio, A ;

Cohen, ML .

PHYSICAL REVIEW B, 1997, 55 (19) :13025-13031

[3] NANO-INDENTATION STUDIES OF ULTRAHIGH STRENGTH CARBON NITRIDE THIN-FILMS [J].

LI, D ;

CHUNG, YW ;

WONG, MS ;

SPROUL, WD .

JOURNAL OF APPLIED PHYSICS, 1993, 74 (01) :219-223

[4] STRUCTURAL-PROPERTIES AND ELECTRONIC-STRUCTURE OF LOW-COMPRESSIBILITY MATERIALS - BETA-SI3N4 AND HYPOTHETICAL BETA-C3N4 [J].

LIU, AY ;

COHEN, ML .

PHYSICAL REVIEW B, 1990, 41 (15) :10727-10734

[5] PREDICTION OF NEW LOW COMPRESSIBILITY SOLIDS [J].

LIU, AY ;

COHEN, ML .

SCIENCE, 1989, 245 (4920) :841-842

[6] Amorphous carbon films rich in diamond deposited by magnetron sputtering [J].

Logothetidis, S ;

Gioti, M .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1997, 46 (1-3) :119-123

[7] Carbon nitride thin films prepared by reactive rf magnetron sputtering [J].

Logothetidis, S ;

Lefakis, H ;

Gioti, M .

CARBON, 1998, 36 (5-6) :757-760

[8] The optical properties of a-C:H films between 1.5 and 10 eV and the effect of thermal annealing on the film character [J].

Logothetidis, S ;

Petalas, J ;

Ves, S .

JOURNAL OF APPLIED PHYSICS, 1996, 79 (02) :1040-1050

[9]

Sjostrom H, 1996, J VAC SCI TECHNOL A, V14, P56, DOI 10.1116/1.579880

[10] SUPERHARD AND ELASTIC CARBON NITRIDE THIN-FILMS HAVING FULLERENE-LIKE MICROSTRUCTURE [J].

SJOSTROM, H ;

STAFSTROM, S ;

BOMAN, M ;

SUNDGREN, JE .

PHYSICAL REVIEW LETTERS, 1995, 75 (07) :1336-1339

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