Analysis compositional homogeneity for MOVPE grown ternary alloys in the horizontal reactor with a rotating susceptor

Using the rotation of the susceptor, the lateral homogeneity of the epilayers can be improved in a horizontal MOVPE-reactor, but the uniformity of the composition along the growth direction has been neither theoretically nor experimentally studied. In this paper the model developed by Xu et al. [J. Crystal Growth 187 (1998) 203] has beep applied to discuss both the lateral and vertical homogeneity of ternary alloys grown on the rotating susceptor in a horizontal MOVPE-reactor. The model calculation has revealed that the rotation results in a lateral uniformity, but at the same time it also causes a periodical variation of the composition in the growth direction. (C) 1998 Published by Elsevier Science B.V. All rights reserved.