Self-defined AlAs-oxide-current-aperture buried heterostructure vertical cavity surface-emitting laser

被引:4
作者
Choi, WJ [1 ]
Dapkus, PD [1 ]
机构
[1] Univ So Calif, Ctr Photon Technol, Dept Elect Engn Electrophys, Los Angeles, CA 90089 USA
关键词
D O I
10.1063/1.122238
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrate a promising technique to fabricate self-defined AlAs-oxide-cullent-apertures for vertical cavity surface-emitting lasers (VCSELs). A self-defined AlAs-oxide-current-aperture buried heterostructure VCSEL was fabricated using a three-step growth sequence. The active region mesa size was 10 mu m X 10 mu m. The lowest threshold current of the lasers was 0.7 mA under continuous-wave operation at room temperature. The differential quantum efficiency was 32%. The lasers operate at temperatures of up to 50 degrees C. (C) 1998 American Institute of Physics.
引用
收藏
页码:1661 / 1663
页数:3
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