Laser ablation of aryltriazene photopolymer films:: Effects of polymer structure on ablation properties

被引:18
作者
Fardel, Romain [1 ]
Feurer, Pascal [1 ]
Lippert, Thomas [2 ]
Nagel, Matthias [1 ]
Nuesch, Frank A. [1 ]
Wokaun, Alexander [2 ]
机构
[1] Empa Swiss Fed Labs Mat Testing & Res, Lab Funct Polymers, CH-8600 Dubendorf, Switzerland
[2] Paul Scherrer Inst, Gen Energy Res Dept, CH-5232 Villigen, Switzerland
关键词
laser ablation; triazene photopolymers; structure-property relations; surface roughness; thin films;
D O I
10.1016/j.apsusc.2007.08.082
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Laser ablation of a homologous series of four tailor-made LTV-sensitive aryltriazene polymers with an increasing content of photodecomposible chromophore units has been studied with a XeCl excimer laser (emission wavelength 308 nm). Irradiation induces a photolytic cleavage of the aryltriazene chromophores which then leads to a fragmentation of the polymer main chain. Resulting effects of different chromophore densities on the ablation parameters of thin films were investigated by profilometry analysis of the ablated spots. No relevant influence of the chromophore density was found for the threshold fluence of laser ablation (similar to 25 mJ/cm(2)) of the four polymers for single-pulse experiments. In the same way, ablation depths per pulse at a given laser fluence and with the same film thickness showed no significant differences. Remarkable differences were found for the resulting surface morphology of ablated spots at laser fluences near the ablation threshold. Homogeneous ablation resulting in a flat and smooth bottom surface of the ablated pits were observed mainly for laser fluences above the range of two times the ablation threshold (>similar to 50 mJ/cm(2)). Investigating the ablation behaviour of such triazene-based photopolymers allows to derive photophysical key parameters necessary for the optimization of application processes where the designed polymers are used as sacrificial absorbing release layers in advanced laser-induced forward transfer (LIFT) applications. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:1332 / 1337
页数:6
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