Highly reliable high-brightness GaN-based flip chip LEDs

被引:20
作者
Chang, S. J. [1 ]
Chen, W. S.
Shei, S. C.
Ko, T. K.
Shen, C. F.
Hsu, Y. P.
Chang, C. S.
Tsai, J. M.
Lai, W. C.
Lin, A. J.
机构
[1] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Dept Elect Engn, Tainan 70101, Taiwan
[2] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan
[3] Epitech Technol Corp, Hsin Shi 744, Taiwan
来源
IEEE TRANSACTIONS ON ADVANCED PACKAGING | 2007年 / 30卷 / 04期
关键词
flip chip (FC); GaN; ITO/Ni/Ag; light emitting diode (LED);
D O I
10.1109/TADVP.2007.898510
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The properties of indium tin-oxide (ITO)/Ni films as transparent ohmic contacts of nitride-based flip chip (FC) light emitting diodes (LEDs) were studies. It was found that 300 degrees C rapid thermal annealed (RTA) ITO(15 nm)/Ni(1 nm) could provide good electrical and optical properties for FC LED applications. It was also found that 20-mA operation voltage and output power of the 465-nm FC LEDs with ITO/Ni/Ag reflective mirror were 3.16 V and 21 mW, respectively. Furthermore, it was found that output intensity of the proposed LED only decayed by 5% after 1200 h under 30-mA current injection at room temperature.
引用
收藏
页码:752 / 757
页数:6
相关论文
共 29 条
[1]   High luminescent efficiency of InGaN multiple quantum wells grown on InGaN underlying layers [J].
Akasaka, T ;
Gotoh, H ;
Saito, T ;
Makimoto, T .
APPLIED PHYSICS LETTERS, 2004, 85 (15) :3089-3091
[2]  
BHA JC, 2002, I PHYS C SERIES, V170, P243
[3]   Solar-blind AlGaN-based p-i-n photodiodes with low dark current and high detectivity [J].
Biyikli, N ;
Kimukin, I ;
Aytur, O ;
Ozbay, E .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (07) :1718-1720
[4]   InGaN/GaN light-emitting diodes with rapidly thermal-annealed Ni/ITO p-contacts [J].
Chang, CS ;
Chang, SJ ;
Su, YK ;
Chiou, YZ ;
Lin, YC ;
Hsu, YP ;
Shei, SC ;
Lo, HM ;
Ke, JC ;
Chen, SC ;
Liu, CH .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (6A) :3324-3327
[5]   High brightness InGaN green LEDs with an ITO on n++-SPS upper contact [J].
Chang, CS ;
Chang, SJ ;
Su, YK ;
Kuo, CH ;
Lai, WC ;
Lin, YC ;
Hsu, YP ;
Shei, SC ;
Tsai, JM ;
Lo, HM ;
Ke, JC ;
Shen, JK .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2003, 50 (11) :2208-2212
[6]   GaN-based p-i-n sensors with ITO contacts [J].
Chang, SJ ;
Ko, TK ;
Su, YK ;
Chiou, YZ ;
Chang, CS ;
Shei, SC ;
Sheu, JK ;
Lai, WC ;
Lin, YC ;
Chen, WS ;
Shen, CF .
IEEE SENSORS JOURNAL, 2006, 6 (02) :406-411
[7]   Nitride-based flip-chip ITO LEDs [J].
Chang, SJ ;
Chang, CS ;
Su, YK ;
Lee, CT ;
Chen, WS ;
Shen, CF ;
Hsu, YP ;
Shei, SC ;
Lo, HM .
IEEE TRANSACTIONS ON ADVANCED PACKAGING, 2005, 28 (02) :273-277
[8]   Highly reliable nitride-based LEDs with SPS plus ITO upper contacts [J].
Chang, SJ ;
Chang, CS ;
Su, YK ;
Chuang, RW ;
Lin, YC ;
Shei, SC ;
Lo, HM ;
Lin, HY ;
Ke, JC .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 2003, 39 (11) :1439-1443
[9]   InGaN-GaN multiquantum-well blue and green light-emitting diodes [J].
Chang, SJ ;
Lai, WC ;
Su, YK ;
Chen, JF ;
Liu, CH ;
Liaw, UH .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (02) :278-283
[10]   400-nm InGaN-GaN and InGaN-AlGaN multiquantum well light-emitting diodes [J].
Chang, SJ ;
Kuo, CH ;
Su, YK ;
Wu, LW ;
Sheu, JK ;
Wen, TC ;
Lai, WC ;
Chen, JF ;
Tsai, JM .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (04) :744-748