Sharpening contact resonance spectra in UAFM using Q-control

被引:11
作者
Fukuda, K
Irihama, H
Tsuji, T
Nakamoto, K
Yamanaka, K
机构
[1] Tohoku Univ, Dept Mat Proc, Aoba Ku, Sendai, Miyagi 9808579, Japan
[2] JEOL Ltd, Tokyo 1968554, Japan
关键词
atomic force microscopy; contact; piezoelectric effect;
D O I
10.1016/S0039-6028(03)00410-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Ultrasonic atomic force microscopy (UAFM) is a new scientific tool for reliable measurement of nano-scale elasticity based on the resonance frequency measurement of AFM cantilever in the contact mode. This paper proposes Q-control for improving resolution of contact mode resonance spectra. First, we perform a theoretical analysis using a distributed mass model for the UAFM cantilever. Next, we confirm experimentally that the Q factor is actually improved by applying Q-control. In the theoretical analysis, we analyze the effect of Q-control for the higher resonance, which cannot be analyzed by the point mass model, and we demonstrate that the optimum phase is different by almost pi between the first and the second resonance. Although, the optimum phase is almost constant -pi/2 in the first resonance, it turns out that it changes with damping in the second resonance. This behavior is discussed in terms of the vibration mode shape. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1145 / 1151
页数:7
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