Photonic systems formed by proximity field nanopatterning

被引:3
作者
Jeon, S [1 ]
Wiederrecht, G [1 ]
Rogers, JA [1 ]
机构
[1] Univ Illinois, Beckman Inst & Seitz Mat Res Lab, Dept Mat Sci & Engn, Urbana, IL 61801 USA
来源
MICROMACHINING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS III | 2005年 / 5720卷
关键词
photonic crystal; proximity field nanopatterning (PnP); multi-photon process; phase mask;
D O I
10.1117/12.597652
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
High resolution, conformable phase masks provide a means to fabricate, in an experimentally simple manner, classes of three dimensional (3D) nanostructures that are technologically important but difficult to generate in other ways. This proposed approach can answer the greatest challenge of photonic system; a simple and reliable fabrication method of periodic and aperiodic structure. Those unique advantages of proximity field nanopatterning originated from direct conformal contact and a further application to multi-photon process, and a representative waveguiding structure are investigated. The patterning capability in a broad range of wavelengths (from UV to near-IR) and unusual structures place this method as a key technique for photonic system.
引用
收藏
页码:187 / 195
页数:9
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