InGaN heterostructures grown by molecular beam epitaxy:: from growth mechanism to optical properties

被引:15
作者
Damilano, B [1 ]
Grandjean, N [1 ]
Vézian, S [1 ]
Massies, J [1 ]
机构
[1] CNRS, Ctr Rech Heteroepitaxie & Ses Applicat, F-06560 Valbonne, France
关键词
growth model; low dimensional structures; optical properties; molecular beam epitaxy; nitrides;
D O I
10.1016/S0022-0248(01)00744-8
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
GaN and InGaN layers are grown by molecular beam epitaxy using ammonia as nitrogen precursor. The lattice mismatch between InN and GaN is very large and a Stranski-Krastanov (SK) growth mode transition can occur above a critical In composition. However, changing the growth conditions, namely increasing the NH3 flux, allows one to promote the 2D growth. This phenomenon can be ascribed to a surfactant effect of hydrogen atoms (or NHx radicals) present at the growth surface. The optical properties of InGaN/GaN quantum dots, made by SK growth mode, and InGaN/GaN quantum wells are compared. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:466 / 470
页数:5
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