Structure and composition of the c(4 x 4) reconstruction formed during gallium arsenide metalorganic vapor-phase epitaxy

被引:19
作者
Han, BK [1 ]
Li, L [1 ]
Fu, Q [1 ]
Hicks, RF [1 ]
机构
[1] Univ Calif Los Angeles, Dept Chem Engn, Los Angeles, CA 90095 USA
关键词
D O I
10.1063/1.121599
中图分类号
O59 [应用物理学];
学科分类号
摘要
Surfaces of GaAs (001) were prepared by metalorganic vapor-phase epitaxy and characterized by scanning tunneling microscopy, x-ray photoelectron spectroscopy, infrared spectroscopy, and low-energy electron diffraction. Upon removal from the reactor, the gallium arsenide surface exhibits a (1 x 2) reconstruction, which is a disordered variant of the c(4 x 4). The disorder arises from the presence of adsorbed alkyl groups. Heating the sample to 350 degrees C desorbs the hydrocarbons and produces a well-ordered c(4x4) structure. A model is proposed for the alkyl-terminated (1 x 2) reconstruction. (C) 1998 American Institute of Physics. [S0003-6951(98)04125-4].
引用
收藏
页码:3347 / 3349
页数:3
相关论文
共 19 条
[1]  
Bellamy L.J., 1975, The Infra-Red Spectra of Complex Molecules, V3rd ed., P13, DOI 10.1007/978-94-011-6017-9_2
[2]   SURFACE RECONSTRUCTIONS OF GAAS(100) OBSERVED BY SCANNING TUNNELING MICROSCOPY [J].
BIEGELSEN, DK ;
BRINGANS, RD ;
NORTHRUP, JE ;
SWARTZ, LE .
PHYSICAL REVIEW B, 1990, 41 (09) :5701-5706
[3]   IN-SITU MONITORING OF THE C(4X4) TO THE 2X4 SURFACE PHASE-TRANSFORMATION ON GAAS(001) BY GRAZING-INCIDENCE X-RAY-DIFFRACTION [J].
ETGENS, VH ;
SAUVAGESIMKIN, M ;
PINCHAUX, R ;
MASSIES, J ;
JEDRECY, N ;
WALDHAUER, A ;
GREISER, N .
SURFACE SCIENCE, 1994, 320 (03) :252-258
[4]   SITES FOR TRIMETHYLGALLIUM ADSORPTION ON GAAS(001) [J].
GEE, PE ;
QI, HH ;
HICKS, RF .
SURFACE SCIENCE, 1995, 330 (02) :135-146
[5]   Characterization of InGaAs/GaAs(001) films grown by metalorganic vapor phase epitaxy using alternative sources [J].
Han, BK ;
Li, L ;
Kappers, MJ ;
Hicks, RF ;
Yoon, H ;
Goorsky, MS ;
Higa, KT .
JOURNAL OF ELECTRONIC MATERIALS, 1998, 27 (02) :81-84
[6]   DETERMINATION OF THE SURFACE-STRUCTURES OF THE GAAS(001)-(2X4) AS-RICH PHASE [J].
HASHIZUME, T ;
XUE, QK ;
ICHIMIYA, A ;
SAKURAI, T .
PHYSICAL REVIEW B, 1995, 51 (07) :4200-4212
[7]   OBSERVATION OF CARBON INCORPORATION DURING GALLIUM-ARSENIDE GROWTH BY MOLECULAR-BEAM EPITAXY [J].
JOSEPH, DM ;
BALAGOPAL, R ;
HICKS, RF ;
SADWICK, LP ;
WANG, KL .
APPLIED PHYSICS LETTERS, 1988, 53 (22) :2203-2204
[8]   Optical characterization of surfaces during epitaxial growth using RDS and GIXS [J].
Kamiya, I ;
Mantese, L ;
Aspnes, DE ;
Kisker, DW ;
Fuoss, PH ;
Stephenson, GB ;
Brennan, S .
JOURNAL OF CRYSTAL GROWTH, 1996, 163 (1-2) :67-77
[9]   ARSENIC DIMERS AND MULTILAYERS ON (001)GAAS SURFACES IN ATMOSPHERIC-PRESSURE ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION [J].
KAMIYA, I ;
TANAKA, H ;
ASPNES, DE ;
FLOREZ, LT ;
COLAS, E ;
HARBISON, JP ;
BHAT, R .
APPLIED PHYSICS LETTERS, 1992, 60 (10) :1238-1240
[10]   STRUCTURE OF (001) GAAS-SURFACES DURING EPITAXIAL-GROWTH BY ORGANOMETALLIC CHEMICAL-VAPOR-DEPOSITION [J].
KAMIYA, I ;
TANAKA, H ;
ASPNES, DE ;
KOZA, M ;
BHAT, R .
APPLIED PHYSICS LETTERS, 1993, 63 (23) :3206-3208