Effect of negative rf bias on electrophotographic properties of hard diamond-like carbon films deposited on organic photoconductors

被引:7
作者
He, XM [1 ]
Lee, ST
Chan, YC
Shu, L
Miao, XS
机构
[1] City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Peoples R China
[2] City Univ Hong Kong, Dept Elect Engn, Hong Kong, Peoples R China
[3] Los Alamos Natl Lab, Mat Sci & Technol Div, Los Alamos, NM 87545 USA
关键词
D O I
10.1088/0953-8984/10/35/015
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Hard diamond-like carbon (DLC) films were prepared on organic photoconductor (OPC) and PMMA (polymethyl methacrylate) samples by electron cyclotron resonance (ECR) CH4-Ar plasma deposition with low substrate bias. The films exhibited a specific electrical resistivity above 1 x 10(14) Omega cm and very high transmittance for the visible spectrum of 370-800 nm. The hardness of the OPC samples was increased at least fourfold after deposition of DLC films. The acceptance voltage, photodischarge rate and dark decay rate of the DLC-coated OPC samples were all improved, and reached optimal values for rf biases around -90 V. The results indicated that the deposition of hard DLC films on OPC is a very promising technique to lengthen the working lifetimes of the OPC materials.
引用
收藏
页码:7835 / 7841
页数:7
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