Thin polymer film based rapid surface acoustic wave humidity sensors

被引：93

作者：

Buvailo, Andrii ^{[1
]}

Xing, Yangjun ^{[2
]}

Hines, Jacqueline ^{[3
]}

Borguet, Eric ^{[2
]}

机构：

[1] Kyiv Natl Taras Shevchenko Univ, Dept Chem, UA-01033 Kiev, Ukraine

[2] Temple Univ, Dept Chem, Philadelphia, PA 19122 USA

[3] ASR&D Corp, Arnold, MD 21012 USA

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2011年 / 156卷 / 01期

关键词：

Surface acoustic wave sensors; Humidity sensors; Thin polymer film; Response time; POLYVINYL-ALCOHOL FILM; RELATIVE-HUMIDITY; SENSITIVITY; DEVICES;

D O I：

10.1016/j.snb.2011.04.080

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Polyvinyl alcohol (PVA) and polyvinyl pyrrolidone (PVP) thin films, deposited on the surface of glass slides, were studied using transmission FTIR spectroscopy upon varying relative humidity (RH) from 2 to 70%. The obtained data revealed fast dynamics of water vapor adsorption-desorption with responses on the order of several seconds. Based on the fast FTIR signal intensity changes versus RH, it was proposed that a similar rapid response can be achieved for PVA and PVP coated SAW devices due to changes in mass-loading and film viscoelastic properties upon absorption of water vapor in the films. Sub-micron thickness films were spin-coated onto the surface of LiNbO(3) SAW substrates. Both PVA and PVP based humidity sensors revealed prompt reversible response to variations in humidity, although PVP-based device demonstrated better sensor parameters with total insertion loss variation of about 50 dB over the studied RH range and response time 1.5s for the humidity step 5-95% (recovery time -2.5 s), representing one of the fastest SAW-based humidity sensors reported to date. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：444 / 449

页数：6

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