Indium-doped molybdenum oxide as a new p-type transparent conductive oxide

被引:51
作者
Chen, Han-Yi [1 ]
Su, Huan-Chieh [2 ]
Chen, Chia-Hsiang [2 ]
Liu, Kuo-Liang [2 ]
Tsai, Chung-Min [2 ]
Yen, Shiang-Jie [2 ]
Yew, Tri-Rung [1 ,2 ]
机构
[1] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu 30013, Taiwan
[2] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 30013, Taiwan
关键词
THIN-FILMS; SEMICONDUCTOR; GROWTH;
D O I
10.1039/c0jm03815f
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
New p-type transparent conductive oxide materials, MoO3: In single crystal nanowires and amorphous films, are synthesized in this work. Both nanowires and amorphous films exhibit high optical transmittance, 80-88% for 80 nm thick films at 400-800 nm wavelength, and low resistivity (down to 5.98 x 10(-4) U cm) suitable for photovoltaic device applications. The amorphous films are also deposited on flexible polyimide substrates and exhibit excellent electrical properties even after bending. Besides, p-MoO3:In/i-ZnO/n-AZO devices are fabricated to demonstrate the potential for all-transparent flexible electronic applications.
引用
收藏
页码:5745 / 5752
页数:8
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