Progress in AlInN-GaN Bragg reflectors: Application to a microcavity light emitting diode

被引:85
作者
Dorsaz, J [1 ]
Carlin, JF [1 ]
Gradecak, S [1 ]
Ilegems, M [1 ]
机构
[1] Ecole Polytech Fed Lausanne, Inst Quantum Elect & Photon, CH-1015 Lausanne, Switzerland
关键词
D O I
10.1063/1.1872197
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the progress in the growth of highly reflective AlInN-GaN distributed Bragg reflectors deposited by metalorganic vapor phase epitaxy. Al1-xInxN layers with an In content around x similar to 0.17 are lattice-matched to GaN, thus avoiding strain-related issues in the mirror while keeping a high refractive index contrast of about 7%. Consequently, a reflectivity value as high as 99.4% at 450 nm was achieved with a 40-pair crack-free distributed Bragg reflector. We measured an average absorption coefficient alpha [cm(-1)] in the AlInN-GaN Bragg reflectors of 43 +/- 14 cm(-1) at 450 nm and 75 +/- 19 cm(-1) at 400 nm. Application to blue optoelectronics is demonstrated through the growth of an InGaN-GaN microcavity light emitting diode including a 12-pair Al0.82In0.18N-GaN distributed Bragg reflector as bottom mirror. The device exhibits clear microcavity effects, improved directionality in the radiation pattern and an optical output power of 1.7 mW together with a 2.6% external quantum efficiency at 20 mA. (C) 2005 American Institute of Physics.
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页数:6
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共 22 条
[1]   Sub-bandgap absorption of gallium nitride determined by photothermal deflection spectroscopy [J].
Ambacher, O ;
Rieger, W ;
Ansmann, P ;
Angerer, H ;
Moustakas, TD ;
Stutzmann, M .
SOLID STATE COMMUNICATIONS, 1996, 97 (05) :365-370
[2]   Impact of planar microcavity effects on light extraction - Part I: Basic concepts and analytical trends [J].
Benisty, H ;
De Neve, H ;
Weisbuch, C .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1998, 34 (09) :1612-1631
[3]   Method of source terms for dipole emission modification in modes of arbitrary planar structures [J].
Benisty, H ;
Stanley, R ;
Mayer, M .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1998, 15 (05) :1192-1201
[4]   Optical constants of epitaxial AlGaN films and their temperature dependence [J].
Brunner, D ;
Angerer, H ;
Bustarret, E ;
Freudenberg, F ;
Hopler, R ;
Dimitrov, R ;
Ambacher, O ;
Stutzmann, M .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (10) :5090-5096
[5]   High-quality AlInN for high index contrast Bragg mirrors lattice matched to GaN [J].
Carlin, JF ;
Ilegems, M .
APPLIED PHYSICS LETTERS, 2003, 83 (04) :668-670
[6]   CRYSTAL-STRUCTURE AND ORIENTATION OF ALXIN1-XN EPITAXIAL LAYERS GROWN ON (0001)ALPHA-AL2O3 SUBSTRATES [J].
GUO, QX ;
ITOH, N ;
OGAWA, H ;
YOSHIDA, A .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (9A) :4653-4657
[7]   Crack-free and conductive Si-doped AlN/GaN distributed Bragg reflectors grown on 6H-SiC(0001) [J].
Ive, T ;
Brandt, O ;
Kostial, H ;
Hesjedal, T ;
Ramsteiner, M ;
Ploog, KH .
APPLIED PHYSICS LETTERS, 2004, 85 (11) :1970-1972
[8]   Structural properties of Al1-xInxN ternary alloys on GaN grown by metalorganic vapor phase epitaxy [J].
Kariya, M ;
Nitta, S ;
Yamaguchi, S ;
Kato, H ;
Takeuchi, T ;
Wetzel, C ;
Amano, H ;
Akasaki, I .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1998, 37 (6B) :L697-L699
[9]   Determination of the band-gap energy of Al1-xInxN grown by metal-organic chemical-vapor deposition [J].
Kim, KS ;
Saxler, A ;
Kung, P ;
Razeghi, M ;
Lim, KY .
APPLIED PHYSICS LETTERS, 1997, 71 (06) :800-802
[10]   Optical and electrical properties of Al1-xInxN films grown by plasma source molecular-beam epitaxy [J].
Lukitsch, MJ ;
Danylyuk, YV ;
Naik, VM ;
Huang, C ;
Auner, GW ;
Rimai, L ;
Naik, R .
APPLIED PHYSICS LETTERS, 2001, 79 (05) :632-634