Design and fabrication of a highly symmetrical capacitive triaxial accelerometer

被引：29

作者：

Li, G ^{[1
]}

Li, ZH ^{[1
]}

Wang, CS ^{[1
]}

Hao, YL ^{[1
]}

Li, T ^{[1
]}

Zhang, DC ^{[1
]}

Wu, GY ^{[1
]}

机构：

[1] Peking Univ, Inst Microelect, Peking, Peoples R China

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2001年 / 11卷 / 01期

关键词：

D O I：

10.1088/0960-1317/11/1/308

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A monolithic capacitive triaxial accelerometer using a highly symmetric quad-beam structure with a single seismic mass is developed. The structure of the accelerometer is analysed in detail theoretically and numerically. Static and modal simulations with a finite element method simulator are done to analyse the mechanical response at accelerations of different directions. The simulated results show that the accelerometer can sense triaxial acceleration separately and synchronously. It has sensitivities of about 7.66, 6.08 and 6.08 fF g(-1) in the z-axis, x-axis and y-axis, respectively, and has nearly zero cross-axis sensitivity theoretically. Moreover, some design optimizations are made to improve its performance. Finally, the fabrication and the basic performance of the device are presented.

引用

页码：48 / 54

页数：7

共 11 条

[1] ETCHING FRONT CONTROL OF (110) STRIPS FOR CORNER COMPENSATION [J].